Reduction of Metal Oxides by Electron Cyclotron Resonance (ECR) Plasma of Hydrogen : A Model Study on Discharge Cleaning
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概要
- 論文の詳細を見る
A reduction experiment on oxides of Cu, Ni, Fe, Mo and Ti was carried out, using a low electron temperature ECR plasma of hydrogen. Reduction rates of these oxides were estimated by observing the disappearance of interference rings of oxide layers. The reduction efficiency η of H^+ flux was evaluated ; η=0.4 for copper oxide and 10^<-3><η10^<-2> for other oxides. Roughly, the reduction rate decreased with an increase in the metal-oxygen binding energy. It was shown that oxide layers with a thickness in the order of magnitude 10^<-1> μm were reduced without difficulty. It is of interest from the viewpoint of discharge cleaning of fusion-oriented machines.
- 社団法人応用物理学会の論文
- 1980-05-05
著者
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SAKAMOTO Yuichi
The Institute of Physical and Chemical Research
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ISHIBE Yukio
The Institute of Physical and Chemical Research
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