Experimental Evidence of Metal Surface Cleaning by Electron Cyclotron Resonance Plasma of Hydrogen
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1979-02-05
著者
-
SAKAMOTO Yuichi
The Institute of Physical and Chemical Research
-
ISHIBE Yukio
The Institute of Physical and Chemical Research
関連論文
- Electron Temperature Measurement Using Intensity Ratio of H_2 Fulcher α(d^3Π_u-a^3Σ_g) to H_α Emissions in a Weakly Ionized Plasma
- Measurements of Energy Distributions in ECR Plasma : Nuclear Science, Plasmas and Electric Discharges
- Simulation Experiment on Removal of Carbon Film from Observation Window of Carbonized Fusion Machine
- Measurement of Hydrogen Atom Flux from ECR Plasma
- A Hot Plasma Produced by a Linear Discharge Device with a Large Capacity Condenser Bank
- Interaction of Amplitude Modulated Microwave with Highly Ionized Magneto-Plasma
- Plasma Produced by Electron Cyclotron Resonance Heating in Poloidal Heliotron Magnetic Field
- Interaction of Amplitude Modulated Microwave with Highly Ionized Magneto-Plasma II.
- Decarbonization by Using ECR Plasma : Nuclear Science, Plasmas and Electric Descharges
- Negative Ions and Energy Distribution in a Hydrogen Plasma Device
- Possibility of Metal Surface Cleaning by Electron Cyclotron Resonance Plasma of Hydrogen
- Reduction of Metal Oxides by Electron Cyclotron Resonance (ECR) Plasma of Hydrogen : A Model Study on Discharge Cleaning
- Experimental Evidence of Metal Surface Cleaning by Electron Cyclotron Resonance Plasma of Hydrogen
- Production of Highly Ionized Plasma
- Nonlinear Interaction of Magnetoplasma with Electromagnetic Wave
- Experimental Study of Excitation of Low Frequency Plasma Waves by Amplitude-Modulated Microwave
- Interaction of Amplitude Modulated Microwave with a Highly Ionized Magnetoplasma. III.
- Measurement of Power Transfer Efficiency from Microwave Field to Plasma under ECR Condition
- A Proposal on Launching System for Lower Hybrid Resonance Plasma Heating
- ECR Plasma in Poloidal Heliotrorn Type Magnetic Field