High-Power Microwave Window for Reactive Plasma Production

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概要

• 論文の詳細を見る

• It is experimentally shown that a high-power coaxial microwave window, the surface of which is covered with a Cr_2O_3 thin film, is very stable against reactive plasma irradiation.

• 社団法人応用物理学会の論文
• 1993-09-15

著者

• Kokai Hideki

  Faculty Of Engineering Tokyo University

• Kokai Hideki

  Faculty Of Engineering Toyo University

• SAKAMOTO Yuichi

  Nichimen Electronic Technology Corporation

• Sakamoto Yuichi

  Nichimen Electronic Technology Corp.

• Kokai Hideki

  Faculty of Engineering of Toyo University, 2100 Kujirai Kawagoeshi, Saitama 350

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• Decarbonization by Using ECR Plasma : Nuclear Science, Plasmas and Electric Descharges
• High-Power Microwave Window for Reactive Plasma Production
• Zinc-Oxide Film Synthesized by ECR Oxygen Plasma

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