Atomic Layer Epitaxy of AlAs Using Dimethylethylamine Alane
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1994-09-15
著者
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IWAI Sohachi
The Institute of Physical and Chemical Research
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AOYAGI Yoshinobu
The Institute of Physical and Chemical Research
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NEMOTO Koshichi
Central Research Institute of Electric Power Industry
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Aoyagi Yoshinobu
The Institute Of Physical And Chemical Research Riken
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NAGANO Masahiro
Central Research Institute of Electric Power Industry, CRIEPI, Laser and Optical Radiation Group
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Nagano Masahiro
Central Research Institute Of Electric Power Industry Criepi Laser And Optical Radiation Group
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Nemoto Koshichi
Central Res. Inst. Of Electric Power Ind. Kanagawa Jpn
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NEMOTO Koshichi
Central Research Institute of Electric Power Industry, CRIEPI, Laser and Optical Radiation Group
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AOYAGI Yoshinobu
The Institute of Physical and Chemical Research, RIKEN
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Nagano Masahiro
Central Research Institute of Electric Power Industry (CRIEPI), Yokosuka, Kanagawa 240-0196, Japan
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