Digital Etching Using KrF Excimer Laser: Approach to Atomic-Order-Controlled Etching by Photo Induced Reaction

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1993-12-30

著者

• ISHII Makoto

  Optoelectronics Joint Research Laboratory

• Sugano Takeshi

  Department Of Electrical Engineering Faculty Of Engineering Osaka University

• AOYAGI Yoshinobu

  The Institute of Physical and Chemical Research

• Aoyagi Yoshinobu

  Riren (the Institute Of Physical And Chemical Research)

• Aoyagi Y

  Inst. Physics And Chemical Res. (riken) Wako Jpn

• Aoyagi Y

  Semiconductor Laboratory Riken The Institute For Physical And Chemical Research

• Ishii M

  Electrotechnical Laboratory

• Ishii M

  Optoelectronics Joint Research Laboratory

• Ishii M

  Toyota Central Res. And Dev. Lab. Inc. Aichi Jpn

• GAMO Kenji

  Faculty of Engineering Science, Osaka University

• SUGANO Takuo

  The Institute of Physical and Chemical Research

• Ishii M

  Liquid Crystal Lab. Sharp Corp.

• Aoyagi Y

  Riren (the Institute Of Physical And Chemical Research)

• Gamo Kenji

  Faculty Of Engineering Science Osaka University

• Gamo Kenji

  Faculty Of Engineering Science And Research Center For Extreme Materials Osaka University

• Meguro T

  Tohoku Univ. Sendai Jpn

• Aoyagi Y

  The Institute Of Physical And Chemical Research

• Ishii M

  Central Research Laboratory Nihon Cement Co. Lid.

• ISHII Masashi

  The Institute of Physical and Chemical Research (RIKEN)

• MEGURO Takashi

  The Institute of Physical and Chemical Research (RIKEN)

• Aoyagi Yoshinobu

  Frontier Research Program Riken

• Aoyagi Yoshinobu

  The Institute Of Physical And Chemical Research (riken):microelectronics R & D Center Chinese Ac

• Ishii M

  Shonan Inst. Technol. Kanagawa Jpn

• Meguro T

  Hokkaido Central Agricultural Experiment Station

• Aoyagi Y

  Inst. Physical And Chemical Res. Riken Wako Jpn

• Sugano T

  Nanoelectronic Materials Laboratory Frontier Research Program Riken

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