Characterization of La-doped YBCO superconducting films deposited by DC magnetron sputtering at various off-axis geometries
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概要
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La-doped YBCO (Y0.9La0.2Ba1.9Cu3Oy) superconducting films were deposited by an off-axis DC magnetron sputtering method. We investigated the relationship between the film characteristics and the deposition conditions, and drew systematical maps in terms of composition, surface morphology, crystal structure and superconducting properties for the films deposited at various spatial geometries of a substrate and a target. Correspondence between the Cu content and the surface morphology was clearly observed. Cu-rich films had precipitates on the surface. Slightly Cu-poor films exhibited c-axis orientation and a high Tc of 87 K. Among them, the film deposited at a rather fast deposition rate exhibited a flat surface with an average surface roughness Ra less than 1 nm for an area of 10 micron square. Considerably Cu-poor films contained a-axis oriented grains or exhibited very rough surfaces. The cationic ratio of Y:La:Ba did not change significantly.
- 公益社団法人 日本セラミックス協会の論文
著者
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SUGANO Tsuyoshi
Superconductivity Research Laboratory, International Superconductivity Technology Center
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ADACHI Seiji
Superconductivity Research Laboratory, International Superconductivity Technology Center
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TANABE Keiichi
Superconductivity Research Laboratory, International Superconductivity Technology Center
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Wakana Hironori
Superconductivity Research Laboratory International Superconductivity Technology Center
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Adachi Seiji
Central Research Laboratory Matsushita Electric Industrial Co. Ltd.
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Adachi Seiji
Central Research Laboratories Matsushita Electric Industrial Co. Ltd.
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Sugano Takeshi
Department Of Electrical Engineering Faculty Of Engineering Osaka University
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Adachi Seiji
Superconductivity Research Laboratory International Superconductivity Technology Center
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Tanabe Keiichi
Superconductivity Res. Lab. Istec
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Sugano Tsuyoshi
Department Of Mineral Science And Technology Faculty Of Engineering Kyoto University
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Wakana H
Iwate Univ. Morioka‐shi Jpn
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Wakana Hironori
Superconductivity Research Laboratory, ISTEC
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Tanabe Keiichi
Superconductivity Research Laboratory, ISTEC
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SUGANO Tsuyoshi
Superconductivity Research Laboratory, ISTEC
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