200 kV Mass-Separated Fine Focused Ion Beam Apparatus
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1985-07-20
著者
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Kim Pil
Riken The Institute Of Physical And Chemical Research
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Kim Pil
The Institute Of Physical And Chemical Research
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Namba Susumu
The Institute Of Physical And Chemical Research
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Shiokawa Takao
The Institute of Physical and Chemical Research Wako
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Toyoda Koichi
The Institute of Physical and Chemical Research Wako
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Gamo Kenji
Osaka University, Faculty of Engineering Science
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Aihara Ryuso
JEOL LTD.
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Anazawa Norimichi
JEOL LTD.
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Kim P
Riken The Institute Of Physical And Chemical Research
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Toyoda Koichi
The Institute Of Physical And Chemical Research
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Shiokawa Takao
The Institute of Physical and Chemical Research
関連論文
- Characterization of GaAs and AlGaAs layers grown by laser atomic layer epitaxy
- New Fabrication Technique of Quantum Wire Structures with Dimensions Precisely Controlled by the CBE Method
- Effects of an Electric Field on the Decay Time of Luminescence from a GaAs/Ga_Al_As Multi-Quantum-Well Structure
- Transient Characteristics of Luminescence from GaAs/Ga_Al_As Multi-Quantum-Well Structure under Resonant Excitation
- Characteristics of the Time-Resolved Photoluminescence in Microcrystalline Si
- Effect of Electric Field on Transient Characteristics of Luminescence from GaAs/Ga_Al_As Multi-Quantum-Well Structure
- Temperature Dependence of Decay Time of Photoluminescence from GaAs/Ga_Al_As Multi Quantum Well Structures
- Transient Characteristics of Photoluminescence from GaAs/Ga_Al_As Single Quantum Well Structure
- Lifetime and diffusion coefficient of carriers in X-ray irradiated a-Si:H
- Determination of Reaction Constant of Exciton-Exciton Collision by Absorption Measurement
- High-Power Subpicosecond Pulse Generation in Near-IR Region by Cavity-Dumped Passive and Synchronous Hybrid Mode-Locking System
- Tunable Subpicosecond Pulse Generation in near IR Region from OX-725 Dye Laser by Passive and Synchronous Hybrid Modelocking Method
- A Tunable Picosecond UV Dye Laser Pumped by the Third Harmonic of a Nd: YAG Laser
- Preparation of High-T_c Superconducting Films by Q-Switched YAG Laser Sputtering : Electrical Properties of Condensed Matter
- Group Velocity and Dispersion Relation of Polariton Wave-Packet in CdS
- Flash-Lamp-Pumped Tunable Ti:BeAl_2O_4 Laser
- Passive Mode Locking of a Flashlamp-Pumped Ti:Sapphire Laser
- Flash Lamp Pumped Tunable Forsterite Laser
- Optical Properties and Lasing of Ti^ Doped BeAl_2O_4
- Preparation and Photoluminescence of High-Purity Homoepitaxial CdS Layers
- Formation of Hg_Cd_xTe by Ion Implantation
- Fabrication of Periodic Structures in GaAs by Focused-Ion-Beam Implantation : Microfabrication and Physics
- Fabrication of Periodic Structures in GaAs by Focused-Ion-Beam Implantation
- 40 nm Width Structure of GaAs Fabricated by Fine Focused Ion Beam Lithography and Chlorine Reactive Ion Etching : Techniques, Instrumentations and Measurement
- FIB Exposure Characteristics of LB Film
- Ridge Type Microfabrication by Maskless Ion Implantation of Si into SiO_2 Film
- 200 kV Mass-Separated Fine Focused Ion Beam Apparatus
- 30 nm Line Fabrication on PMMA Resist by Fine Focused Be Ion Beam
- Concentration Profiles of Nickel and Chromium Implanted in Mild Steel
- Dot Structures Fabricated by Laser Etching : Laser Wavelength Dependence of Dot Structures Fabricated by Laser Etching
- Isotope Scrambling Mechanisms of Chlorine LIS by an Ar Ion Laser Induced Reaction of Cl_2 with C_2Cl_4
- Isotope Shift and Absorption Spectrum of Chlorine Available for Laser Isotope Separation
- Study of Absorption Spectrum of Bromine Molecule for Laser Isotope Separation
- Measurement of Thermal Diffusivity by Laser Pulse
- Relation of Laser Induced Ion Energy to Laser Power
- Ring-Type Ti:sapphire Regenerative Amplifier with a Wide Tuning Range
- Low-Temperature Growth of Thin Films of Al_2O_3 by Sequential Surface Chemical Reaction of trimelhylaluminum and H_2O_2
- Maskless Fabrication of High Quality DFB Laser Gratings by Laser Induced Chemical Etching
- Electron and Laser Beam Processing
- Beam Angle and Output Energy of Ruby Laser in External Mirror Alignment
- Study on Saturat Process by Anomalous Dispersion of Ruby Laser
- Stimulated Emission from Nd^ Glass
- The Surface Temperature of Metals Heated with Laser
- Micropatterning of Quartz Substrates by Multi-Wavelength Vacuum-Ultraviolet Laser Ablation
- Distribution Profiles and Annealing Characteristics of Defects in GaAs Induced by Low-Energy FIB Irradiation : Electrical Properties of Condensed Matter
- Highly Collimated Laser Beam from Tunable Distributed-Feedback Dye Laser
- Blazing of Holographic Grating by Ion Etching Technique
- Triggering Characteristics of TEA CO_2 Laser
- Internal Q-Switching in a CdS Laser Pumped by an Electron Beam
- A Transverse Electron Beam Source for the Excitation of CW Lasers
- Cold Jet Infrared Absorption Spectroscopy: The v_3 Band of UF_6
- Temperature Tuning of 4-Methylumbelliferone Dye Laser
- Crystallization of Vacuum-Deposited Indium Antimonide Films by the Electron Beam Zone-Melting Process
- Growth-Temperature Dependence of the Quality of Al_2O_3 Prepared by Sequential Surface Chemical Reaction of Trimethylaluminum and H_2O_2
- Growth of epitaxial TiN thin film on Si substrate by pulsed laser deposition(II)
- Growth of epitaxial TiN thin film on Si substrate by pulsed laser deposition(I)
- Rapid Formation of Arsenic-Doped Layer More Than 1.0 μm Deep in Si Using Two KrF Excimer Lasers
- Bi-Level Structures for Focused Ion Beam Using Maskless Ion Etching
- Generation of High-Current Photoelectrons Using a Subpicosecond Ultraviolet Laser
- Wavelength Control of Thin Film DFB Laser by Changing Film Thickness
- Modulation of the Optical Guided Wave by UV Light Excitation
- Reaction Temperature of HgS
- UF6 Photodissociation through Measurement of Visible and Infrared Luminescence
- Formation of High Resistance Region in GaAs by Ga Focused-Ion-Beam Implantation
- Characteristics of the Time-Resolved Photoluminescence in Microcrystalline Si
- Performance of a Focused-Ion-Beam Implanter with Tilt-Writing Function
- Thermal Conductivity of ThO2-UO2 System
- Reactive Species Produced by Laser Irradiation. The Reaction of CN Radicals with Hydrocarbons
- The Reaction of Water Vapor and Carbon Vapor Produced by Laser Irradiation
- Laser-induced Chemical Reactions. VI. On the Formation Processes of Acetylene
- Laser-induced Chemical Reactions. III. The Decomposition of Metal Salts of Carboxylic Acid and Selective Decomposition
- Laser-induced Chemical Reactions. IV. Reactions of Carbon Vapor with Hydrogen at Various Pressures
- The Decomposition of Organic Substances by Laser Heating