Growth of epitaxial TiN thin film on Si substrate by pulsed laser deposition(I)
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概要
- 論文の詳細を見る
- 1997-01-01
著者
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TOYODA Kenji
Graduate School of Engineering Science, Osaka University
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Toyoda Koichi
The Institute of Physical and Chemical Research Wako
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Toyoda K
Science University Of Tokyo
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Sugioka Koji
The Institute of Physical and Chemical Research (RIKEN)
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JYUMONJI Masayuki
Department of Electrical Engineering, Tokyo Denki University
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XU Shifa
The Institute of Physical and Chemical Research(RIKEN)
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DU Liren
The Institute of Physical and Chemical Research(RIKEN)
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JYUMONJI Masayuki
The Institute of Physical and Chemical Research(RIKEN)
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Jyumonji M
Department Of Electrical Engineering Tokyo Denki University
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Toyoda Koichi
The Institute Of Physical And Chemical Research
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Sugioka Koji
Laser Technology Lab., RIKEN- Institute of Physical and Chemical Research
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