3D Micromachining of Photosensitive Glass by Femtosecond Laser for Microreactor Manufacture
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概要
著者
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Midorikawa K
Riken
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Sugioka Koji
Laser Technology Lab., RIKEN- Institute of Physical and Chemical Research
関連論文
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- Micropatterning of Quartz Substrates by Multi-Wavelength Vacuum-Ultraviolet Laser Ablation
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- Observation of Self-Channeled Plasma Formation and Bulk Modification in Optical Fibers Using High-Intensity Femtosecond Laser
- 3D microoptics fabricated inside glass using a femtosecond laser
- 3D Micromachining of Photosensitive Glass by Femtosecond Laser for Microreactor Manufacture
- Si Barrier Metal Growth by Hybrid Radical Beam-Pulsed Laser Deposition of TiN
- Characterization of Stainless Steel SUS304 Modified by KrF Excimer Laser Implant-Deposition and Its Properties after the Thermal Treatment
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- Growth of epitaxial TiN thin film on Si substrate by pulsed laser deposition(I)
- Rapid Formation of Arsenic-Doped Layer More Than 1.0 μm Deep in Si Using Two KrF Excimer Lasers
- Control of Surface Color of Stainless Steel 304 by KrF Excimer Laser Implant Deposition
- Highly Coherent Soft X-Ray Generation by Macroscopic Phase Matching of High-Order Harmonics : Optics and Quantum Electronics
- Second-Harmonic Generation from Intense, 100-fs Ti:Sapphire Laser Pulses in Potassium Dihydrogen Phosphate, Cesium Lithium Borate and β-Barium Metaborate