FIB Exposure Characteristics of LB Film

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1987-08-20

著者

• Kim Pil

  Riken The Institute Of Physical And Chemical Research

• Suzuki M

  Shizuoka Univ. Hamamatsu

• Namba S

  Japan Atomic Energy Res. Inst. Kyoto Jpn

• Namba Susumu

  Riken The Institute Of Physical And Chemical Research

• Mori K

  Saga Univ. Saga Jpn

• MATSUI Shinji

  Fundamental Res. Labs., NEC Corporation

• TOYODA Koichi

  RIKEN, The Institute of physical and Chemical Research

• SHIOKAWA Takao

  RIKEN, The Institute of Physical and Chemical Research

• SUZUKI Masayoshi

  Fundamental Research Laboratories, NEC Corporation

• MORI Katsumi

  Fundamental Research Laboratories, NEC Corporation

• Namba Susumu

  Research Center For Extreme Materials And Department Of Electrical Engineering Osaka University

• Sakamoto Toshitugu

  Faculty Of Engineering Science Osaka University

• Mori K

  Department Of Radiological Sciences Ibaraki Prefectural University Of Health Sciences

• Kim P

  Riken The Institute Of Physical And Chemical Research

• Shiokawa Takao

  Semiconductor Laboratory Riken The Institute For Physical And Chemical Research

• Namba S

  Riken The Institute Of Physical And Chemical Research

• Toyoda Koichi

  Riken The Institute Of Physical And Chemical Research

• Namba S

  Faculty Of Engineering Osaka University

• Mori Katsumi

  Fundamental Research Laboratories

• Suzuki Masayoshi

  Fundamental Research Laboratories Nec Corporation

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