Effect of Mechanical Vibration on Patterning Characteristics in Synchrotron Radiation Lithography
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概要
- 論文の詳細を見る
In order to improve pattern precision and overlay accuracy in synchrotron radiation (SR) X-ray lithography, it is required that a stepper be very stable mechanically and have a high positioning accuracy with regard to both the mask-to-wafer gap and the stage. It is important to clarify the effect of mechanical vibrations on patterning characteristics. We investigated the effect of mechanical vibrations on line-and-space patterns with dimensions of less than 0.2 μm by carrying out exposure experiments and patterning simulations. Strong vibrations generally increase the line width, thereby reducing the dose margin. The amplitude of the vibrations should be kept at less than a quarter of the minimum feature size in order to prevent reduction of the dose margin. Furthermore, we developed a simple method of calculating resist pattern profiles from the intensity profile, the thickness of the remaining resist, and the electron scattering depth. The change in line width obtained in this way was almost the same as the measured change.
- 社団法人応用物理学会の論文
- 1996-12-30
著者
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HAGA Tetsuya
Department of Applied Physics, Hokkaido University
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Haga T
Ntt Telecommunications Energy Lab. Kanagawa Jpn
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Suzuki M
Shizuoka Univ. Hamamatsu
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Suzuki M
Department Of Electronic Engineering Faculty Of Engineering Hokkaido University
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Suzuki Mitsuru
Cryogenic Centre University Of Tokyo
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FUKUDA Makoto
NTT Telecommunications Energy Laboratories
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Suzuki M
Sci. Univ. Tokyo Chiba Jpn
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Suzuki M
Research Center Asahi Glass Co. Ltd.
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Suzuki Mariko
Advanced Semiconductor Devices Research Laboratories R&d Center Toshiba Corporation
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Fukuda M
Chitose Inst. Sci. And Technol. Hokkaido Jpn
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DEGUCHI Kimiyoshi
NTT LSI Laboratories
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Suzuki M
Department Of Electronics Graduate School Of Engineering Tohoku University
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Deguchi K
Department Of Electronics And Information Systems Osaka University
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FUKUDA Makoto
NTT LSI Laboratories
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ENDO Naoe
NTT LSI Laboratories
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TSUYUZAKI Haruo
NTT LSI Laboratories
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SUZUKI Masanori
NTT LSI Laboratories
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Tsuyuzaki H
Ntt Lsi Laboratories
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