Low-Temperature Synthesis of Aluminium Nitride Film by HCD-Type Ion Plating
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1992-04-15
著者
-
Suzuki M
Shizuoka Univ. Hamamatsu
-
Ogawa Kenichi
Seiko Instruments Inc.
-
岸 真人
東京大学電子工学科
-
Ogawa Ken'ichi
Dep.bot. Fac.sci. Kyoto Univ.
-
Suzuki Mariko
Advanced Semiconductor Devices Research Laboratories R&d Center Toshiba Corporation
-
Ogawa K
Department Of Advanced Materials Science Faculty Of Engineering Kagawa University
-
KISHI Matsuo
Seiko Instruments Inc.,
-
SUZUKI Mizuaki
Seiko Instruments Inc.,
-
Suzuki M
Department Of Electronics Graduate School Of Engineering Tohoku University
-
Ogawa Kenichi
Dep.bot. Fac.sci. Kyoto Univ.
-
Ogawa Ken-ichi
Dep.bot. Fac.sci. Kyoto Univ.
関連論文
- SC-11-5 超広帯域電磁波発生に向けた新型光源技術
- C-4-16 短尺異常分散平坦化ファイバを用いるスーパーコンティニューム光発生
- Generation of Superoxide Anion and Localization of CuZn-Superoxide Dismutase in the Vascular Tissue of Spinach Hypocotyls : Their Association with Lignification
- GENERATION OF SUPEROXIDE IS ACCOMPANIED WITH BIOSYNTHESIS OF LIGNIN IN TRACHEARY ELEMENT DIFFERENTIATION OF CULTURED ZINNIA ELEGANS CELLS
- MOLECULAR PROPERTIES OF CuZn-SUPEROXIDE DISMUTASE ISOZYMES FROM EUKARYOTIC ALGA, Spirogyra sp.
- TOBACCO CHLOROPLASTIC CuZn-SUPEROXIDE DISMUTASE CANNOT FUNCTION WITHOUT ITS LOCALIZATION AT THE SITE OF SUPEROXIDE GENERATION (PS I)
- GENERATION OF SUPEROXIDE AND LIGNIN SYNTHESIS IN SPINACH HYPOCOTYL
- INTERACTION OF SPINACH CHLOROPLASTIC CuZn-SUPEROXID DISMUTASE WITH THE THYLAKOID MEMBRANES
- INTRA-AND EXTRACELLULAR LOCALIZATION OFCYTOSOLIC CuZn-SUPEROXIDE DISMUTASE IN SPINACH LEAVES
- Intra- and Extra-Cellular Localization of "Cytosolic" CuZn-Superoxide Dismutase in Spinach Leaf and Hypocotyl
- Attachment of CuZn-Superoxide Dismutase to Thylakoid Membranes at the Site of Superoxide Generation (PSI) in Spinach Chloroplasts : Detection by Immuno-Gold Labeling After Rapid Freezing and Substitution Method : ENVIRONMENTAL AND STRESS RESPONSES : STRUC
- Reactive Ion Beam Etching and Overgrowth Process in the Fabrication of InGaN Inner Stripe Laser Diodes
- Reactive Ion Beam Etching and Overgrowth Process for Fabrication of InGaN Inner Stripe Laser Diodes
- Room Temperature Pulsed Operation of Nitride Based Multi-Quantum-Well Laser Diodes with Cleaved Facets on Conventional C-Face Sapphire Substrates
- Addition of New Pinning Center to Unidirectionally Melt Solidified Y-Ba-Cu-O Superconductor
- Preparation of Y-Ba-Cu-O Superconductors with High Critical Current Density by Unidirectional Melt Solidification
- A Simple Method of Fabricating Preferentially Oriented YBa_2Cu_3O_ Film on Silver Substrates
- 磁気光学/電気光学プローブによる微細回路上高周波電磁界の可視化(LSIシステムの実装・モジュール化・インタフェース技術, テスト技術)
- 磁気光学/電気光学プローブによる微細回路上高周波電磁界の可視化(LSIシステムの実装・モジュール化・インタフェース技術, テスト技術)
- 高空間分解・広帯域磁気光学プローブとその高密度実装技術への適用(光センサ, 一般)
- C-14-1 共振器構造光ファイバ端磁気光学プローブの性能評価とその波形計測への適用(C-14. マイクロ波フォトニクス, エレクトロニクス1)
- C-14-3 光単側波帯変調器を用いる2モード QPSK 信号生成法
- Simulation of Rotating Magnetic Field Current Drive Using Multilayer Model
- Measurement of Electron Density and Temperature of Plasma with RF Current Drive by Alfven Wave
- Spectral Fluctuations in the Stokes Output Pulse Pumped with a High-Pressure CO_2 Laser
- 偏波安定化構成MOプローブを用いた携帯電話筺体上電流分布推定
- B-1-280 偏波安定化構成MOプローブによる電流分布推定(B-1. アンテナ・伝播C(アンテナシステム), 通信1)
- C-14-6 ファラデー回転子光バイアス法を用いる直線集積型 MO プローブヘッド
- C-14-17 前置光増幅器による光プローブシステムの感度改善
- 偏波安定化構成MOプローブによるアンテナ電流分布の高精度測定(アンテナ測定・電磁環境,無線応用システムの進展と多様化を支えるアンテナ・伝搬の設計・解析・測定技術論文)
- B-1-170 偏波安定化構成MOプローブによる電流分布位相評価検討(B-1.アンテナ・伝播B(アンテナ一般),通信1)
- 偏波安定化構成MOプローブによる電流分布位相推定(衛星通信・放送技術及び一般)
- B-5-144 フォトニックダウンコンバージョンにおけるチャープ反転機能とそれを用いた60 GHz帯アップリンク構成の簡素化
- Equivalent Circuit Model for Positive/Negative Reflection-Type SAW Reflectors : SAW and BAW Materials, Devices and Theories
- Equivalent Networks for Surface Acoustic Wave Metallic Gratings : SAW and Communication Devices
- Finite-Element Analysis of Periodic Waveguides for Acoustic Waves : SAW and Communication Devices
- FIB Exposure Characteristics of LB Film
- Effects of Growth Parameters on Oxygen Incorporation into InGaAlP Grown by Metalorganic Chemical Vapor Deposition
- Fabrication of Chalcogenide Amorphous Semiconductor Diodes Using Low Temperature Thermal Diffusion Techniques
- Chalcogenide Amorphous Semiconductor Diodes
- Diffusion Profile of Some Metal Ions in Chalcogenide Amorphous Semiconductors
- DIVISION OF CULTURED ZINNIA ELEGANS CELLS IS REGULATED BY ACTIVE SPECIES OF OXYGEN
- 光ファイバ端磁気光学プローブの高性能化とその微細領域磁界/電流分布計測への適用(EMCと磁気応用II)
- SB-2-4 高速・高空間分解能特性を有する光ファイバ端磁気光学プローブ
- B-4-69 光ファイバ端磁気光学プローブによる微細配線上の磁界分布計測
- 磁気光学プローブによるテストLSIパッケージ周辺ピン上の1D磁界分布測定
- 光ファラデー効果を利用する高周波磁界計測用光ファイバプローブの検討
- 光ファラデー効果を利用する高周波磁界計測用光ファイバプローブの検討
- B-4-20 光ファイバ端磁気光学プローブの空間分解能評価
- Ultrasonic Studies of the High-T_c Superconductor YBa_2Cu_3O_y : Physical Acoustics
- Sound Velocity and Attenuation in YBa_2Cu_3O_y : Thermal and Statistical Properties
- C-14-16 近傍磁界プロービングにおける電流分布推定の空間分解能に関する一提案
- C-14-15 BSL 逆解析法による近傍磁界分布からの微細回路電流分布推定
- 光ファイバ端磁気光学(FEMO)プローブによる微小領域マイクロ波帯磁界分布測定
- Operating Tolerance for Laser Power and Temperature of Phase Change Erasable Optical Disk : Media
- Ge-Te-Sb Based Overwritable Phase Change Optical Disk : PHASE CHANGE MEDIA I
- B-5-260 光電ミキシング法による光ミリ波双方向リンク構成の簡素化
- Metalorganic Vapor Phase Epitaxial Growth for High Electron Mobility Transistor LSIs
- AlGaAs/GaAs and AlGaAs/InGaAs/GaAs High Electron Mobility Transistors Grown by Metalorganic Vapor Phase Epitaxy Using Tertiarybutylarsine
- MOVPE Growth of AlGaAs /GaAs Heterostructures for HEMT LSI
- Effect of RF Bias on Low-Temperature Synthesis of Aluminium Nitride Film by Hollow Cathode Discharge-Type Ion Plating
- Low-Temperature Synthesis of Aluminium Nitride Film by HCD-Type Ion Plating
- Domain Motion of Ferroelectricity of Bi_2SrTa_2O_9 Single Crystals under an AC-Voltage Electric Field
- Study of Glass Transition in Mn-Doped Ge_Te_ Glass by Electron Spin Resonance
- Characteristics of Mg-Doped GaN and AlGaN Grown by H_2-Ambient and N_2-Ambient Metalorganic Chemical Vapor Deposition
- Ferroelectricity of Bi_2SrTa_2O_9 Single Crystals Grown by the Self-Flux Method
- ESR Study of Glass Transition in Mn-Doped Se_Te_ Chalcogenide Glass in Non-Isothermal Process
- Preparation of Layered Ferroelectric Bi_2SrTa_2O_9 Single-Crystal Platelets
- Optical Gain of Wurtzite GaN/AlGaN Quantum Well Lasers
- Optical Gain Calculation of Wurtzite GaN/AlGaN Quantum Well Laser
- Photoelectron Spectroscopy of EuBa_2Cu_3O_ Thin Film Surfaces Treated by an Electron Cyclotron Resonance Oxygen Ion Beam
- Water-Immersion-Induced Surface Reactiorns of EuBa_2Cu_3O_y Thin Films
- Observation of GaAs(110) Surface by an Ultrahigh-Vacuum Atomic Force Microscope
- Fabrication of Josephson Junctions by Focused Electron Beam Irradiation
- Atomically Resolved Image of Cleaved GaAs(110) Surface Observed with an Ultrahigh Vacuum Atomic Force Microscope
- Observation of Atormic Defects on LiF(100) Surface with Ultrahigh Vacuum Atomic Force Microscope (UHV AFM)
- Fabrication of DC Supereonducting Quantum Interference Devices with Hybrid Structure of Polycrystalline Y_1Ba_2Cu_3O_x Films and Epitaxial Y_1Ba_2Cu_3O_x Films
- Multi-Wafer Growth of HEMT LSI Quality AlGaAs/GaAs Heterostructures by MOCVD
- 微小重力下でのシリコンの融液成長(無重力下における結晶成長)
- Evaluation of Overlay Accuracy for 100-nm Ground Rule in Proximity X-Ray Lithography
- Performance of X-Ray Stepper for Next-Generation Lithography
- 成長のカイネティクス研究用その場観察レ-ザラマン分光システムの開発と歪みの評価 (原子レベルでの結晶成長機構) -- (核形成と成長のカイネティクス)
- 化合物半導体太陽電池〔1〕(観測ロケット基礎開発研究特集号)
- A Novel Reflective Liquid Crystal Display with High Resolution and Full Color Capability
- Optical Design for Soft X-Ray Projection Lithography : X-Ray Lithography
- Optimum Dark-State Voltage for Wide-Viewing-Arngle Optically-Compensated-Bend-Mode Liquid-Crystal-Displays
- Optical Design for Soft X-Ray Projection Lithography
- Influence of H_2O on the SiO_2 Growth by Parallel-Resonant RF Plasma Oxidation
- Enhanced Growth of Silicon Dioxide Films by Parallel-Resonant RF Plasmas
- Corrugation-Pitch-Modulated Distributed Feedback Lasers with Ultranarrow Spectral Linewidth
- Effect of Mechanical Vibration on Patterning Characteristics in Synchrotron Radiation Lithography
- Overlay Repeatability in Mix-and-Match Exposure Using the SR Stepper: SS-1
- Nonbolometric Infrared Detection in La_Sr_xCUO_4 and YBa_2Cu_3O_y Epitaxial Thin Films
- Optical Detection in High-T_c Superconducting Thin Films : II-B Optical Spectroscopies : II Oxide Superconductors; Experiments II : Electronic States
- Anomalous Surface Tension of Liquid ^3He at Low Temperatures : I. QUANTUM LIQUIDS AND SOLIDS : Interfaces of He
- Surface Waves on Liquid Helium : Physical Acoustics
- Direct Observation of Crystallization Process from Amorphous Y-Ba-Cu-O Film by means of Optical Microscopy
- Bi-Level Structures for Focused Ion Beam Using Maskless Ion Etching
- High Field Properties of Superconducting Nb_3Ge Films Prepared by Chemical Vapor Deposition
- Critical Current Density in Superconducting Nb_3Ge and NbN Films at Fields upto 30 T