Enhanced Growth of Silicon Dioxide Films by Parallel-Resonant RF Plasmas

スポンサーリンク

概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1990-07-20

著者

• HAYASHI Masatoshi

  Department of Pediatrics, Uwajima City Hospital

• Suzuki M

  Shizuoka Univ. Hamamatsu

• Kitagawa A

  Kanazawa Univ. Kanazawa Jpn

• Kitagawa Akio

  Department Of Electrical & Computer Engineering Faculty Of Technology Kanazawa University

• Kitagawa Akio

  Department Of Electrical And Computer Engineering Faculty Of Engineering Kanazawa University

• SUZUKI Masakuni

  Department of Obstetrics and Gynecology, Tohoku University School of Medicine

• Takeuchi M

  Nagoya Univ. Nagoya Jpn

• TAKEUCHI Masaki

  Department of Applied Chemistry, Faculty of Engineering, Kanagawa University

• Suzuki Mariko

  Advanced Semiconductor Devices Research Laboratories R&d Center Toshiba Corporation

• Takeuchi Manabu

  Department Of Electrical And Electronic Engineering Ibaraki University

• Suzuki M

  Department Of Electronics Graduate School Of Engineering Tohoku University

• KASAGI Masakatsu

  Department of Electrical & Computer Engineering, Faculty of Technology, Kanazawa University

• KOUCHI Yoshitaka

  Department of Electrical & Computer Engineering, Faculty of Technology, Kanazawa University

• Suzuki Masakuni

  Department Of Obstetrics And Gynecology Tohoku University School Of Medicine

• Takeuchi Masaki

  Department Of Applied Chemistry Faculty Of Engineering Kanagawa University

• Suzuki Masakuni

  Department Of Electrical And Computer Engineering Faculty Of Technology Kanazawa University

• Kouchi Yoshitaka

  Department Of Electrical & Computer Engineering Faculty Of Technology Kanazawa University

• Kasagi Masakatsu

  Department Of Electrical & Computer Engineering Faculty Of Technology Kanazawa University

• Hayashi Masatoshi

  Department Of Electrical & Computer Engineering Faculty Of Technology Kanazawa University

• HAYASHI Masatoshi

  Department of Agricultural Chemistry, Nagoya University

関連論文

• A Novel Immunomodulator, FTY720, Prevents Development of Experimental Autoimmune Myasthenia Gravis in C57BL/6 Mice(Pharmacology)
• Reactive Ion Beam Etching and Overgrowth Process in the Fabrication of InGaN Inner Stripe Laser Diodes
• Reactive Ion Beam Etching and Overgrowth Process for Fabrication of InGaN Inner Stripe Laser Diodes
• Room Temperature Pulsed Operation of Nitride Based Multi-Quantum-Well Laser Diodes with Cleaved Facets on Conventional C-Face Sapphire Substrates
• Addition of New Pinning Center to Unidirectionally Melt Solidified Y-Ba-Cu-O Superconductor
• Preparation of Y-Ba-Cu-O Superconductors with High Critical Current Density by Unidirectional Melt Solidification
• A Simple Method of Fabricating Preferentially Oriented YBa_2Cu_3O_ Film on Silver Substrates
• Simulation of Rotating Magnetic Field Current Drive Using Multilayer Model
• Measurement of Electron Density and Temperature of Plasma with RF Current Drive by Alfven Wave
• 有機溶媒,ナフタレンの電気伝導に及ぼすフラ-レンド-ピングの影響
• Spectral Fluctuations in the Stokes Output Pulse Pumped with a High-Pressure CO_2 Laser
• THE SIGNIFICANCE OF NONSTRESS TEST FROM 24 TO 42 WEEKS' GESTATION
• Formation and Characterization of GaAs Quantum Wires at Giant Step Edges on Vicinal (110) GaAs Surfaces
• Equivalent Circuit Model for Positive/Negative Reflection-Type SAW Reflectors : SAW and BAW Materials, Devices and Theories
• Equivalent Networks for Surface Acoustic Wave Metallic Gratings : SAW and Communication Devices
• Finite-Element Analysis of Periodic Waveguides for Acoustic Waves : SAW and Communication Devices
• Effects of Anthracene Doping on Electrical and Light-Emitting Behavior of 8-Hydroxyquinoline-Aluminum-Based Electroluminescent Devices
• FIB Exposure Characteristics of LB Film
• Effects of Growth Parameters on Oxygen Incorporation into InGaAlP Grown by Metalorganic Chemical Vapor Deposition
• Oxidative DNA Damage is Induced by Chronic Cigarette Smoking, but Repaired by Abstention
• Performance Evaluations of Communication Systems Employing Stratospheric Aircrafts and LEO Satellites
• Fabrication of Chalcogenide Amorphous Semiconductor Diodes Using Low Temperature Thermal Diffusion Techniques
• Chalcogenide Amorphous Semiconductor Diodes
• Diffusion Profile of Some Metal Ions in Chalcogenide Amorphous Semiconductors
• Size Distribution of Dew Droplets and Dew Formation Effect on Deposition Fluxes
• Controlling Factors of Weak Acid and Base Concentrations in Urban Dewwater : Comparison of Dew Chemistry with Rain and Fog Chemistry
• A Sharp Photocurrent Enhancement in Photoelectrochemical Cells with a Photocathode Sensitized by Dye Films of Rhodamine-C_ and Methylviolet-C_ Prepared by Langmuir-Blodgett Techniques
• Ultrasonic Studies of the High-T_c Superconductor YBa_2Cu_3O_y : Physical Acoustics
• Sound Velocity and Attenuation in YBa_2Cu_3O_y : Thermal and Statistical Properties
• Methods for Imaging and Analyses of Intracellular Organelles Using Fluorescent and Luminescent Proteins
• Operating Tolerance for Laser Power and Temperature of Phase Change Erasable Optical Disk : Media
• Ge-Te-Sb Based Overwritable Phase Change Optical Disk : PHASE CHANGE MEDIA I
• Metalorganic Vapor Phase Epitaxial Growth for High Electron Mobility Transistor LSIs
• AlGaAs/GaAs and AlGaAs/InGaAs/GaAs High Electron Mobility Transistors Grown by Metalorganic Vapor Phase Epitaxy Using Tertiarybutylarsine
• MOVPE Growth of AlGaAs /GaAs Heterostructures for HEMT LSI
• Infected Papillary Fibroelastoma Attached to the Atrial Septum
• Isolation of a Tobacco cDNA Encoding Sar1 GTPase and Analysis of Its Dominant Mutations in Vesicular Traffic Using a Yeast Complementation System
• Nicorandil Infusion Accelerates ST-Segment Resolution in Patients with Acute Myocardial Infarction : Subanalysis in SMART Study
• Effect of RF Bias on Low-Temperature Synthesis of Aluminium Nitride Film by Hollow Cathode Discharge-Type Ion Plating
• Low-Temperature Synthesis of Aluminium Nitride Film by HCD-Type Ion Plating
• Domain Motion of Ferroelectricity of Bi_2SrTa_2O_9 Single Crystals under an AC-Voltage Electric Field
• Study of Glass Transition in Mn-Doped Ge_Te_ Glass by Electron Spin Resonance
• Characteristics of Mg-Doped GaN and AlGaN Grown by H_2-Ambient and N_2-Ambient Metalorganic Chemical Vapor Deposition
• Ferroelectricity of Bi_2SrTa_2O_9 Single Crystals Grown by the Self-Flux Method
• ESR Study of Glass Transition in Mn-Doped Se_Te_ Chalcogenide Glass in Non-Isothermal Process
• Preparation of Layered Ferroelectric Bi_2SrTa_2O_9 Single-Crystal Platelets
• Optical Gain of Wurtzite GaN/AlGaN Quantum Well Lasers
• Optical Gain Calculation of Wurtzite GaN/AlGaN Quantum Well Laser
• Photoelectron Spectroscopy of EuBa_2Cu_3O_ Thin Film Surfaces Treated by an Electron Cyclotron Resonance Oxygen Ion Beam
• Water-Immersion-Induced Surface Reactiorns of EuBa_2Cu_3O_y Thin Films
• Observation of GaAs(110) Surface by an Ultrahigh-Vacuum Atomic Force Microscope
• Fabrication of Josephson Junctions by Focused Electron Beam Irradiation
• Atomically Resolved Image of Cleaved GaAs(110) Surface Observed with an Ultrahigh Vacuum Atomic Force Microscope
• Observation of Atormic Defects on LiF(100) Surface with Ultrahigh Vacuum Atomic Force Microscope (UHV AFM)
• Fabrication of DC Supereonducting Quantum Interference Devices with Hybrid Structure of Polycrystalline Y_1Ba_2Cu_3O_x Films and Epitaxial Y_1Ba_2Cu_3O_x Films
• Multi-Wafer Growth of HEMT LSI Quality AlGaAs/GaAs Heterostructures by MOCVD
• Evaluation of Overlay Accuracy for 100-nm Ground Rule in Proximity X-Ray Lithography
• Performance of X-Ray Stepper for Next-Generation Lithography
• Liquid Phase Epitaxial Growth of lnGaAsP on GaAs_P_y Substrates (y=0.3l and 0.39)
• LPE Growth of Lattice-Matched InGaAsP on GaAs_P_ Substrates and Low Threshold Current Density Operation of Visible InGaAsP DH Lasers
• CW Lasing Characteristics of Visible InGaAsP Lasers Grown on GaAsP Substrates
• Structure of a-Si and Its Transient Phases upon Rapid Heating
• Long-term change of anti-acetylcholine receptor antibody in patients with myasthenia gravis after thymectomy
• cDNA Cloning of Nuclear Localization Signal Binding Protein NBP60, a Rat Homologue of Lamin B Receptor, and Identification of Binding Sites of Human Lamin B Receptor for Nuclear Localization Signals and Chromatin^1
• Characterization of p92, Karyopherin β, Co-Purified with N-Acetylglucosamine-Bearing Nucleoporins from Rat Liver Nuclear Envelopes
• A Novel Reflective Liquid Crystal Display with High Resolution and Full Color Capability
• Preparation of Hyperbranched Aromatic Poly(ethersulfone)s Possessing Sulfonic Acid Terminal Groups for Polymer Electrolyte
• Dual Jet Ionizer for Manufacturing Semiconductor Devices
• Contact Charging of a-Se Electrophotographic Photoreceptor with Molten Gallium
• Optical Design for Soft X-Ray Projection Lithography : X-Ray Lithography
• Optimum Dark-State Voltage for Wide-Viewing-Arngle Optically-Compensated-Bend-Mode Liquid-Crystal-Displays
• Does Different D-dimer Reduce the Use of Duplex Scanning to Rule out DVT in Patients with PE?
• Evaluation of fluence and pulse-duration on purpuric threshold using an extended pulse pulsed-dye laser in the treatment of port wine stains
• Composition Modulation in Quantum Wire Structures on Vicinal (110) GaAs Studied by Photoluminescence
• Optical Design for Soft X-Ray Projection Lithography
• Electrochromic Behavior of Amorphous Copperphthalocyanine Thin Films
• Comparison of Capsular Morphology between two Different Surface Structures of Silicone Implants
• Effects of Molecular Configurations on the Electrical Resistivity of Titanylphthalocyanine Thin Films
• Humidity Sensitivity of Lamb Waves on Composite Polyimide/ZnO/Si_3N_4 Structure
• Wide Bandwidth Low Loss Filters Using Piezoelectric Leaky SAW Unidirectional Transducers with Floating Electrodes : SAW and Communication Devices
• Influence of H_2O on the SiO_2 Growth by Parallel-Resonant RF Plasma Oxidation
• Enhanced Growth of Silicon Dioxide Films by Parallel-Resonant RF Plasmas
• UHF-Range Positive/Negative Reflection Type SAW Resonators on LiNbO_3 Using New Fabrication Techinique : SAW and BAW Materials, Devices and Theories
• Corrugation-Pitch-Modulated Distributed Feedback Lasers with Ultranarrow Spectral Linewidth
• Effect of Mechanical Vibration on Patterning Characteristics in Synchrotron Radiation Lithography
• Overlay Repeatability in Mix-and-Match Exposure Using the SR Stepper: SS-1
• Submicron Nonvolatile Memory Cell Based on Reversible Phase Transition in Chalcogenide Glasses
• Nonbolometric Infrared Detection in La_Sr_xCUO_4 and YBa_2Cu_3O_y Epitaxial Thin Films
• Optical Detection in High-T_c Superconducting Thin Films : II-B Optical Spectroscopies : II Oxide Superconductors; Experiments II : Electronic States
• Radiographic progression of cervical lesions in patients with rheumatoid arthritis receiving infliximab treatment
• Anomalous Surface Tension of Liquid ^3He at Low Temperatures : I. QUANTUM LIQUIDS AND SOLIDS : Interfaces of He
• Surface Waves on Liquid Helium : Physical Acoustics
• Waveguide-Type Multifrequency Acoustooptic Modulators
• Mechanism of Copper-Induced Ovulation by the Incubation Experiment of the Anterior Pituitary Gland
• Direct Observation of Crystallization Process from Amorphous Y-Ba-Cu-O Film by means of Optical Microscopy
• Bi-Level Structures for Focused Ion Beam Using Maskless Ion Etching
• High Field Properties of Superconducting Nb_3Ge Films Prepared by Chemical Vapor Deposition
• Critical Current Density in Superconducting Nb_3Ge and NbN Films at Fields upto 30 T
• Clinical investigation of genetic contributions to childhood-onset epilepsies and epileptic syndromes
• Long-term medical, educational, and social progneses of childhood-onset epilepsy : a population-based study in a rural district of Japan

もっと見る 閉じる

スポンサーリンク