MOVPE Growth of AlGaAs /GaAs Heterostructures for HEMT LSI

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1989-10-20

著者

• Ohori Tatsuya

  Fujitsu Laboratories Ltd.

• Itoh Hisayoshi

  Institute Of Materials Science University Of Tsukuba

• Suzuki M

  Shizuoka Univ. Hamamatsu

• Itoh H

  Semiconductor Academic Research Center

• Itoh Hitoshi

  Semiconductor Academic Research Center

• KASAI Kazumi

  Fujitsu Laboratories Ltd.

• KOMENO Junji

  Fujitsu Laboratories Ltd.

• SUZUKI Masahisa

  Fujitsu Ltd.

• MITANI Eizou

  Fujitsu Laboratories Ltd.

• TANAKA Hitoshi

  Fujitsu Laboratories Ltd.

• ITOH Hiromi

  Fujitsu Laboratories Ltd.

• MITANI Eizo

  FUJITSU LABORATORIES LIMITED

• Kasai K

  Fujitsu Laboratories Ltd.

• Komeno J

  Fujitsu Laboratories Ltd.

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