Effect of Underlayers on the Morphology and Orientation of Aluminum Films Prepared by Chemical Vapor Deposition Using Dimethylaluminumhydride
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1999-12-15
著者
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Itoh Hisayoshi
Institute Of Materials Science University Of Tsukuba
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Itoh H
Semiconductor Academic Research Center
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SHIMOGAKI Yukihiro
Department of Materials Engineering, The University of Tokyo
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SUGIYAMA Masakazu
Department of Electronic Engineering, School of Engineering, University of Tokyo
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Itoh Hitoshi
Semiconductor Academic Research Center
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Sugiyama Masaaki
R & D Laboratories-i Central R & D Bureau Nippon Steel Cotporation
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Sugiyama Masaaki
Advanced Materials & Technology Research Laboratories Nippon Steel Corporation
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Sugiyama M
Department Of Electric Engineering And Information Systems School Of Engineering The University Of T
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Sugiyama Munehiro
Ntt Interdisciplinary Research Laboratories
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KOMIYAMA Hiroshi
Department of Chemical System Engineering, The University of Tokyo
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AOYAMA Jyun-ichi
Semiconductor Academic Research Center
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IINO Tomohisa
Department of Materials Science and Metallurgy, School of Engineering, University of Tokyo
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Sugiyama M
Institute Of Engineering Innovation School Of Engineering The University Of Tokyo
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Shimogaki Yukihiro
Department Of Materials Engineering Faculty Of Engineering Univerity Of Tokyo
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Sugiyama Masakazu
Department Of Biotechnology Graduate School Of Agriculture And Life Sciences The University Of Tokyo
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Komiyama H
Department Of Chemical System Engineering School Of Engineering University Of Tokyo
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Komiyama Hiroshi
Department Of Chemical Engineering Faculty Of Engineering University Of Tokyo
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Shimogaki Y
Department Of Materials Engineering School Of Engineering The University Of Tokyo
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Iino Tomohisa
Department Of Applied Biology And Chemistry Tokyo University Of Agriculture
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Iino Tomohisa
Department Of Materials Science And Metallurgy School Of Engineering University Of Tokyo
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Shimogaki Yukihiro
Department of Electronic Engineering, University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113, Japan
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Shimogaki Yukihiro
Department of Chemical System Engineering, Faculty of Engineering, University of Tokyo,
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SHIMOGAKI YUKIHIRO
Department of Chemical Engineering, University of Tokyo
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