Kinetics of GaAs Metalorganic Chemical Vapor Deposition Studied by Numerical Analysis Based on Experimental Reaction Data

Department of Surgery, NTT West Osaka Hospital

Department of Electronic Engineering, The University of Tokyo

Department of Materials Engineering, The University of Tokyo

Department of Electronic Engineering, School of Engineering, University of Tokyo

金沢工業大学大学院

Department Of Electronic Engineering Faculty Of Engineering University Of Tokyo

Research Center For Advanced Science And Technology Univ. Of Tokyo

Graduate School Of Engineering The University Of Tokyo

R & D Laboratories-i Central R & D Bureau Nippon Steel Cotporation

Advanced Materials & Technology Research Laboratories Nippon Steel Corporation

Department Of Electric Engineering And Information Systems School Of Engineering The University Of T

Nec Compound Semiconductor Devices Ltd. Shiga Jpn

Ntt Interdisciplinary Research Laboratories

Research Center For Advanced Science And Technology The University Of Tokyo

Department of Chemical System Engineering, The University of Tokyo

Department of Materials Science and Metallurgy, School of Engineering, University of Tokyo

Department of Electronic Engineering, School of Engineering, University of Tokyo

Department Of Materials Science And Metallurgy School Of Engineering University Of Tokyo

Department Of Surgery Ntt West Osaka Hospital

Institute Of Engineering Innovation School Of Engineering The University Of Tokyo

Department Of Materials Engineering Faculty Of Engineering Univerity Of Tokyo

Department Of Biotechnology Graduate School Of Agriculture And Life Sciences The University Of Tokyo

Department Of Chemical System Engineering School Of Engineering University Of Tokyo

Department Of Chemical Engineering Faculty Of Engineering University Of Tokyo

Department Of Materials Engineering School Of Engineering The University Of Tokyo

Department Of Electronic Engineering School Of Engineering University Of Tokyo

Department Of Electrical Engineering And Information Systems The University Of Tokyo

Department Of Electronic Engineering Faculty Of Engineering The University Of Tokyo

Broadcasting Science Resarch Laboratories Hnk(japan Broadcasting Corporation)

Department of Electronic Engineering, University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113, Japan

Research Center for Advanced Science and Technology, The University of Tokyo

Department of Chemical System Engineering, Faculty of Engineering, University of Tokyo,

Department of Chemical Engineering, University of Tokyo

Department of Electrical and Computer Engineering, Graduate School of Engineering, Yokohama National University, 79-5 Tokiwadai, Hodogaya-ku, Yokohama 240-8501, Japan