Formation of High-Contrast Periodic Corrugations by Optimizing Optical Parameters of Photoresists in 325 nm Laser Holographie Exposure

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概要

• 論文の詳細を見る

• Formation of high-contrast periodic corrugations by means of laser holographic exposure is investigated. This paper first describes optical parameters of several positive-acting photoresists extracted from UV transmission spectra analysis. Conventional g-line photoresists have high values of these parameters and might not be suitable for this purpose. Next, shapes of periodic corrugations are simulated in three typical g-line photoresists using other optical parameters as well as developing process properties. Both s- and p-polarized plane-wave differences and substrate dependence are also considered. As a result, the shapes are found to depend mainly on γ values of the photoresists. High-contrast corrugations and a highly reproducible process are expected if an optimum photoresist is selected. Finally, we fabricate high-contrast periodic corrugations with a period of 255 nm, and the result is in good agreement with the theoretical estimation.

• 社団法人応用物理学会の論文
• 1995-02-28

著者

• NAKANO Yoshiaki

  Department of Surgery, NTT West Osaka Hospital

• Okamoto Kazuya

  Central Research Laboratory Nikon Corporation

• TADA Kunio

  Department of Electronic Engineering, The University of Tokyo

• Tada Kunio

  Department Of Electronic Engineering Faculty Of Engineering University Of Tokyo

• Nakano Yoshiaki

  Research Center For Advanced Science And Technology Univ. Of Tokyo

• Nakano Y

  Research Center For Advanced Science And Technology The University Of Tokyo

• OKAMOTO Kimiharu

  JEOL Limited

• Nakano Yoshiaki

  Department Of Surgery Ntt West Osaka Hospital

• Okamoto K

  Jeol Limited

• Nakano Yoshiaki

  Department Of Electrical Engineering And Information Systems The University Of Tokyo

• Tada Kunio

  Department Of Electronic Engineering Faculty Of Engineering The University Of Tokyo

• Nakano Yukie

  Research Center for Advanced Science and Technology, The University of Tokyo

• Tada Kunio

  Department of Electrical and Computer Engineering, Graduate School of Engineering, Yokohama National University, 79-5 Tokiwadai, Hodogaya-ku, Yokohama 240-8501, Japan

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