Design and Fabrication of Monolithically Integrated Lateral-Electrode Etched-Mirror Laser with Y-Branch Single-Mode Waveguide in GaAs/AlGaAs
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概要
- 論文の詳細を見る
Design and fabrication of a monolithically integrated lateral-electrode laser with a Y-branch single-mode waveguide are described. The ridge-guided Fabry-Perot laser and strip-loaded waveguide are coupled with the evanescent field, and are fabricated simply without resorting to complicated regrowth procedures. The laser has planar lateral electrodes with a dry-etched cavity. Furthermore, the waveguide is of the strip-loaded type, consisting of two cladding layers having different carrier concentrations to reduce the impurity absorption. The growth structure is optimized theoretically, and the coupled beams from the waveguide are observed experimentally.
- 社団法人応用物理学会の論文
- 1995-09-15
著者
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山田 晃
東京農工大学生物システム応用科学府
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NAKANO Yoshiaki
Department of Surgery, NTT West Osaka Hospital
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Okamoto Kazuya
Central Research Laboratory Nikon Corporation
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TADA Kunio
Department of Electronic Engineering, The University of Tokyo
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Tada Kunio
Department Of Electronic Engineering Faculty Of Engineering University Of Tokyo
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Nakano Yoshiaki
Research Center For Advanced Science And Technology Univ. Of Tokyo
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Nakano Yoshiaki
Graduate School Of Engineering The University Of Tokyo
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Nakano Y
Research Center For Advanced Science And Technology The University Of Tokyo
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OKAMOTO Kimiharu
JEOL Limited
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Nakano Yoshiaki
Department Of Surgery Ntt West Osaka Hospital
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Okamoto K
Jeol Limited
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YAMADA Atsushi
Central Research Laboratory, Nikon Corporation
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Nakano Yoshiaki
Department Of Electrical Engineering And Information Systems The University Of Tokyo
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Tada Kunio
Department Of Electronic Engineering Faculty Of Engineering The University Of Tokyo
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Nakano Yukie
Research Center for Advanced Science and Technology, The University of Tokyo
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Tada Kunio
Department of Electrical and Computer Engineering, Graduate School of Engineering, Yokohama National University, 79-5 Tokiwadai, Hodogaya-ku, Yokohama 240-8501, Japan
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