Epitaxial Growth of Si_<1-y>C_y Film by Low Temperature Chemical vapor Deposition
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2000-11-01
著者
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YAMADA Akira
Departments of Immunology, Kurume University School of Medicine
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山田 明
東京工業大学大学院理工学研究科電子物理工学専攻
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山田 晃
東京農工大学生物システム応用科学府
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KONAGAI Makoto
Department of Physical Electronics, Tokyo Institute of Technology
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YAGI Shuhei
Department of Physical Electronics, Tokyo Institute of Technology
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ABE Katsuya
Department of Physical Electronics, Tokyo Institute of Technology
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KONAGAI Makoto
Tokyo Institute of Technology
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YAGI Syuhei
Department of Physical Electronics, Tokyo Institute of Technology
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Yamada Akira
Department Of Cardiology Aso-iizuka Hospital
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Abe K
Mitsubishi Materials Corporation Central Research Institute
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Yagi S
Department Of Physical Electronics Tokyo Institute Of Technology
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Abe Katsuya
Department Of Applied Chemistry Faculty Of Engineering Kogakuin University
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Konagai M
Tokyo Inst. Technol. Tokyo Jpn
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山田 晃
東京農工大学生物システム応用科学研究科
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Yagi Syuhei
Department Of Physical Electronics Tokyo Institute Of Technology
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Konagai Makoto
Department Of Electrical And Electronic Engineering. Tokyo Institute Of Technology
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Konagai M
Department Of Physical Electronics Tokyo Institute Of Technology
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Yagi Shin-ichi
Department Of Physical Electronics Tokyo Institute Of Technology
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Yagi S
Meisei Univ. Tokyo Jpn
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Konagai Makoto
Department Of Electrical & Electronic Engineering Tokyo Institute Of Technology
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