Defect Evaluation of Heavily P-Doped Si Epitaxial Films Grown at Low Temperature

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1993-05-15

著者

• YAMADA Akira

  Departments of Immunology, Kurume University School of Medicine

• Takahashi K

  Department Of Physical Electronics Tokyo Institute Of Technology

• 山田 晃

  東京農工大学生物システム応用科学府

• KONAGAI Makoto

  Department of Physical Electronics, Tokyo Institute of Technology

• Takahashi K

  National Inst. Res. In Inorganic Materials Ibaraki Jpn

• Yamada Akira

  Department Of Cardiology Aso-iizuka Hospital

• TANIGAWA Shoichiro

  Institute of Materials Science, The University of Tsukuba

• WEI Long

  Institute of Materials Science, University of Tsukuba

• Wei Long

  Institute Of Materials Science University Of Tsukuba

• TAKAHASHI Kiyoshi

  Department of Medicine, National Minami-Okayama Hospital

• JIA Ying

  School of Pharmacy, Shenyang Pharmaceutical University

• Takahashi Kiyoshi

  Department Of Internal Medicine Ii Okayama University Graduate School Of Medicine And Dentistry

• Takahashi K

  Department Of Physical Electronics Tokyo Institute Of Tecnology

• JIA Ying

  Department of Physical Electronics, Tokyo Institute of Technology O-okayama

• OSHIMA Takayuki

  Department of Physical Electronics, Tokyo Institute of Technology O-okayama

• Takahashi K

  Tokyo Inst. Technol. Yokohama Jpn

• Oshima Takayuki

  Department Of Physical Electronics Tokyo Institute Of Technology

• Tanigawa Shoichiro

  Institute Of Applied Physics University Of Tsukuba

• Takahashi Kuniharu

  Graduate School Of Science And Technology Niigata University

• Takahashi Kouchiro

  National Institute For Research In Inorganic Materials

• Jia Ying

  School Of Pharmacy Shenyang Pharmaceutical University

• Konagai Makoto

  Department Of Electrical & Electronic Engineering Tokyo Institute Of Technology

• Takahashi Kiyoshi

  Department Of Electrical And Electronic Engineering Tokyo Institute Of Technology

• TAKAHASHI Kenji

  Semiconductor Research Laboratory, Pioneer Electronic Corporation

• Takahashi Kiyoshi

  Department Of Agronomy Faculty Of Agriculture Tohoku University

• Oshima Takayuki

  Department of Electrical and Electronic Engineering, Tokyo Institute of Technology

• JIA Ying

  Department of Electrical and Electronic Engineering, Tokyo Institute of Technology

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