Quantum Chemical Study on the Interaction of NF3 with Si
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概要
- 論文の詳細を見る
- 1998-09-07
著者
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Kumagai M
National Research Institute For Metals
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山田 晃
東京農工大学生物システム応用科学府
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Miyamoto A
New Ind. Creation Hatchery Center Tohoku Univ.
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Kawasaki M
Institute For Materials Research (imr) Tohoku University
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Endou Akira
Department of Applied Chemistry, Graduate School of Engineering, Tohoku University
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MIYAMOTO Akira
Department of Applied Chemistry, Graduate School of Engineering, Tohoku University
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Kubo Momoji
Department Of Molecular Chemistry And Engineering Tohoku University
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Kubo Momoji
Department Of Applied Chemistry Graduate School Of Engineering Tohoku University
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Endou Akira
Dep. Of Applied Chemistry Graduate School Of Engineering Tohoku Univ.
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Little Thomas
Department Of Materials Science And Engineering University Of Washington
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Takeuchi K
Riken (the Institute Of Physical And Chemical Research)
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Kawasaki Masashi
Department Of Applied Biological Science Tokyo Noko University
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Takeuchi K
Greduate School Of Science And Engineering Saitama University:riken (the Institute Of Physical And C
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OHUCHI Fumio
Department of Physics, Sophia University
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YAMADA Aruba
Department of Materials Chemistry, Graduate School of Engineering, Tohoku University
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TERAISHI Kazuo
Department of Materials Chemistry, Graduate School of Engineering, Tohoku University
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KITAJIMA Masahiro
National Research Institute for Metals
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AMMAL S.
Department of Materials Chemistry, Graduate School of Engineering, Tohoku University
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Cheettu S.salai
Department Of Materials Chemistry Graduate School Of Engineering Tohoku University
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Miyamoto Akira
Department Of Applied Chemistry Graduate School Of Engineering Tohoku University
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Endou Akira
Department Of Applied Chemistry Graduate School Of Engineering Tohoku University
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Ohuchi Fumio
Department Of Materials Science And Engineering University Of Washington
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Teraishi Kazuo
Department Of Materials And Chemistry Graduate School Of Engineering Tohoku University
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Kitajima Masahiro
National Institute For Materials Sciences Japan.
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Kitajima Masahiro
National Institute for Materials Science
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Kitajima Masahiro
National Defense Academy of Japan, Yokosuka, Kanagawa 239-8686, Japan
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