Deposition of wsi_x Films from Preactivated Mixture of WF_6/SiH_4

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1994-01-15

著者

• EGASHIRA Yasuyuki

  Graduate School of Engineering Science, Osaka University

• Nagata Shoichi

  Dep. Of Materials Sci. And Engineering Muroran Inst. Of Technol. 27-1 Mizumoto-cho Muroran Hokkaido

• Nagata Shoichi

  Muroran Inst. Technol. Hokkaido Jpn

• Nagata S

  Osaka Univ.

• NAGATA Shinji

  Institute for Chemical Research, Kyoto University

• SHIMOGAKI Yukihiro

  Department of Materials Engineering, The University of Tokyo

• YAMAGUCHI Sadae

  Institute for Materials Research, Tohoku University

• Takahiro Katsumi

  Institute for Materials Research, Tohoku University

• EGASHIRA Yasuyuki

  Department of Chemical Engineering, Osaka University

• Egashira Yasuyuki

  Graduate School Of Engineering Science Osaka University

• Egashira Yasuyuki

  Department Of Chemical Engineering Graduate School Of Engineering Science Osaka University

• Yamaguchi Sadaei

  Institute For Materials Research Tohoku University

• Nagata S

  Tohoku University

• Nasu Shoichi

  Kanazawa Institute Of Technology

• KOMIYAMA Hiroshi

  Department of Chemical System Engineering, The University of Tokyo

• Takahiro K

  Tohoku University

• Takahiro Katsumi

  Institute For Materials Research Tohoku University

• Takahiro Katsumi

  Department Of Electrical Engineering Hiroshima University

• SAITO Takeyasu

  Department of Chemical Engineering, Faculty of Engineering, The University of Tokyo

• YUYAMA Yoshiaki

  Hitachi VLSI Engineering Corp.

• SUGAWARA Katsuro

  Hitachi VLSI Engineering Corp.

• Yamaguchi Sadae

  Institute For Materials Research Tohoku University

• Shimogaki Yukihiro

  Department Of Materials Engineering Faculty Of Engineering Univerity Of Tokyo

• Komiyama H

  Department Of Chemical System Engineering School Of Engineering University Of Tokyo

• Komiyama Hiroshi

  Department Of Chemical Engineering Faculty Of Engineering University Of Tokyo

• Shimogaki Y

  Department Of Materials Engineering School Of Engineering The University Of Tokyo

• Saito Takeyasu

  Department Of Chemical Engineering Faculty Of Engineering The University Of Tokyo

• Sugawara K

  Hitachi Vlsi Engineering Corp.:(present Address)department Of Computer Science College Of Engineerin

• Shimogaki Yukihiro

  Department of Electronic Engineering, University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113, Japan

• Shimogaki Yukihiro

  Department of Chemical System Engineering, Faculty of Engineering, University of Tokyo,

• SHIMOGAKI YUKIHIRO

  Department of Chemical Engineering, University of Tokyo

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