Kinetic Study on Oxidation of Si(111) Surfaces using H_2O

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1997-04-15

著者

• TAKAMI Seiichi

  Department of Materials Chemistry, Graduate School of Engineering, Tohoku University

• EGASHIRA Yasuyuki

  Department of Chemical Engineering, Osaka University

• Egashira Yasuyuki

  Department Of Chemical Engineering Graduate School Of Engineering Science Osaka University

• Egashira Yasuyuki

  Department Of Chemical System Engineering Faculty Of Engineering The University Of Tokyo

• Takami Seiichi

  Department Of Chemical System Engineering Faculty Of Engineering The University Of Tokyo

• KOMIYAMA Hiroshi

  Department of Chemical System Engineering, The University of Tokyo

• Komiyama Hiroshi

  Department Of Chemical Engineering Faculty Of Engineering University Of Tokyo

• Komiyama Hiroshi

  Department Of Chemical System Engineering Faculty Of Engineering The University Of Tokyo

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