Quantum Chemical Molecular Dynamics Studies on the Chemical Mechanical Polishing Process of Cu Surface

スポンサーリンク

概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2003-04-30

著者

• Imamura A

  Hiroshima Kokusai Gakuin Univ.

• MIYAMOTO Akira

  Department of Applied Chemistry, Graduate School of Engineering, Tohoku University

• Kubo M

  Tohoku Univ. Sendai Jpn

• Kubo Momoji

  Department Of Molecular Chemistry And Engineering Tohoku University

• TAKAMI Seiichi

  Department of Materials Chemistry, Graduate School of Engineering, Tohoku University

• IMAMURA Akira

  Department of General Education, Faculty of Engineering, Hiroshima Kokusai Gakuin University

• YOKOSUKA Toshiyuki

  Department of Materials Chemistry, Graduate School of Engineering, Tohoku University

• SASATA Katsumi

  Department of Materials Chemistry, Graduate School of Engineering, Tohoku University

• KUROKAWA Hitoshi

  Department of Materials Chemistry, Graduate School of Engineering, Tohoku University

• Takami Seiichi

  Department Of Materials Chemistry Graduate School Of Engineering Tohoku University

関連論文

• Theoretic Study of Electronic and Electrical Properties for Nano-Structural ZnO
• Adsorption Properties of CH_3OH on Al(111) and Fe(100) Surfaces : A Periodic First-Principles Investigation
• Tight-Binding Quantum Chemistry Study on Excitation Properties of Perylene with Acrylic Acid on Anatase (001) Surface
• 走査プローブ顕微鏡
• 走査型トンネル顕微鏡によるMoS_2表面ステップ近傍の電子状態の観察
• 光励起STMによるTiO_2表面光吸収サイトの観察
• TiO_2(110)表面における光励起サイトの局在
• STM/AFMによる触媒表面解析
• TiO_2 (110) Surface Preparation by UV Light Irradiation for Scanning Tunneling Microscopy Observations
• ゼオライト(010)表面原子と吸着分子のAFM観察
• 新素材研究用UHV-STM装置の試作 : - 安定操作条件の決定 -
• A Study of Local Processing on Solid Surfaces with Atomic Force Microscope
• 新素材研究用UHV-STM装置の試作
• AFM技術の幕開け
• 原子間力顕微鏡(AFM)によるゼオライト研究 : 結晶成長, 表面原子配列および吸着分子像
• ゼオライト(010)表面に液相吸着したピリジン塩基分子薄膜内部の分子配向構造 : AFM/半経験分子軌道計算による検討
• トンネル発光研究用 UHV-STM装置の試作
• 走査プローブ顕微鏡による吸着分子像の観察
• 原子間力顕微鏡(AFM)によるゼオライト表面でのピリジン塩基分子の吸着配列・配向構造
• 新素材研究用UHV-STM装置の試作
• 金属粒子担持によるSiO_2薄膜中での電荷減少Si^種の生成-シリカ担持金属触媒における金属-担体間電子的相互作用の可能性-
• Quantum chemical investigation of excited state and photo-induced catalysis (第93回触媒討論会B講演予稿 テーマ「グリーンケミストリー」)
• A Theoretical Study of Dynamic Behavior of Diphenyldisulphide Molecule on Fe Surface: Novel Ultra-Accelerated Quantum Chemical Molecular Dynamics Approach
• Tight-Binding Quantum Chemical Molecular Dynamics Study on Interfacial Electron Transfer in Dye-Sensitized Anatase (001) Surface
• Development of Multi-Scale Electrical Conductivity Simulator with the Joule Heating Module and its Application to Polycrystalline SiO_2
• Influence of Chemical Topology on the Electrical Properties of Carbon Black-A Theoretical Study
• EFFECTS OF DAILY 2-Gz LOAD ON HUMAN CARDIOVASCULAR FUNCTION DURING WEIGHTLESSNESS SIMULATION USING 4-DAY HEAD-DOWN BED REST
• Development of a Seebeck Coefficient Prediction Simulator Using Tight-Binding Quantum Chemical Molecular Dynamics
• Development of the multi-scale simulator for the dye-sensitized TiO_2 nanoporous electrode based on quantum chemical calculation
• A Theoretical Approach for Developing New p-Type Transparent Conducting Metal Oxide
• Theoretical Study on the Photophyscial Properties of an Efficient Sensitizer for Nanocrystalline TiO_2-Based Solar Cells
• Development of A Combined Thermal Conductivity Prediction Simulator Including Conduction Electron and Lattice Vibration Effects
• Theoretical Study on the Electronic and Structural Properties of p-Type Transparent Conducting Metal Oxides
• Development of Accelerated Large-Scale Electronic Structure Calculation Program for Designing of Rare Earth Phosphors
• A Theoretical Study of the Effect of Eu ion Dopant on the Electronic Excitations of Yttrium Oxide and Yttrium Oxy-Sulphide
• Study on the Role of Oxygen Vacancies of Indium Tin Oxide by Density Functional Theory and Accelerated Quantum Chemical Molecular Dynamics Method
• A Theoretical Study on Influence of Oxygen Vacancies on the Electronic Properties of Indium Oxide and Indium Tin Oxide
• Tight-Binding Quantum Chemical Calculations of Electronic Structures of Indium Tin Oxide
• -0854-EVALUATION OF CORONARY THROMBI AFTER PTCA AND INVESTIGATION OF THE EFFICACY OF ANTIPLATELET AGENTS ON THROMBI BY ANGIOSCOPY : THE 54th ANNUAL SCIENTIFIC MEETING OF THE JAPANESE CIRCULATION SOCIETY
• SENSITIVITY ANALYSES OF HEART RATE VARIABILITY VARIABLES BY AN INCREMENTAL, PASSIVE HEAD-UP TILT
• The Pathogenesis of an Impending Infarction and its Treatment : An angioscopic analysis : PATHOGENESIS AND MANAGEMENT OF IMPENDING MYOCARDIAL INFARCTION
• Accelerated Quantum Chemical Molecular Dynamics Study on the Properties of Organic Light-Emitting Diodes
• Theoretical Investigation of the Electronic Properties of PEDOT : PSS Conducting Polymer on Indium Tin Dioxide (ITO) Surface : an Accelerated Quantum Chemical Molecular Dynamics Method
• Molecular Dynamics and Quantum Chemical Molecular Dynamics Approach to Design of MgO Protecting Layer in Plasma Display
• Theoretical Design of MgO Protecting Layer in Plasma Display by New Kinetic Monte Carlo Simulator
• Investigation of Hydrogen Chemisorption on GaAs(111)A Ga Surface by In Situ Monitoring and Ab Initio Calculation
• Computational Chemistry Study of Diamond-like Carbon : Functions and Structure Control by Frictional Force
• Theoretical Study on Electronic and Electrical Properties of Nano Structural ZnO
• Theoretical study on the electrical properties of conducting carbon based materials
• Dielectric Breakdown Simulation by Molecular Dynamics and Tight-Binding Quantum Chemistry Methods
• Development of New Calculation Method for Rare Earth Element and Large Scale Electronic Structure Calculation of Blue Phosphor BaMgAl_O_:Eu^
• Quantum Chemical Molecular Dynamics Studies on the Chemical Mechanical Polishing Process of Cu Surface
• A Theoretical Study on the Realistic Low Concentration Doping in Silicon Semiconductors by Accelerated Quantum Chemical Molecular Dynamics Method
• Quantum Chemical Molecular Dynamics Simulation of the Plasma Etching Processes
• Tight-Binding Molecular Dynamics Study of Hydrogen Molecule Inside Silicon Crystal
• Tight-binding Molecular Dynamics Simulation of Desorbed SiO Molecule during the Oxidation of Si(111) Surface
• Quantum Chemical Study on the Interaction of NF3 with Si
• Tight-Binding Molecular Dynamics Simulation of Desorbed SiO Molecule during the Oxidation of Si(111) Surface
• Atomic Control of Ultrafine Gold Particles on MgO(100) as Investigated by Molecular Dynamics and Computer Graphics
• Molecular Dynamics Simulations of Metal Clusters and Metal Deposition on Metal Surfaces
• Aluminum Reflow Behavior in Via-Hole Filling Investigated by Molecular Dynamics Simulation and Computer Graphics
• THE INFLUENCE OF ^B ADDITION ON THE SWELLING SUPPRESSION BY PHOSPHORUS AND TITANIUM IN Fe-Cr-Ni
• -123-ALTERNATION IN LEFT VENTRICULAR FUNCTION AND REFLEX SYMPATHETIC RESPONSE WITH DRIP INFUSION OF NITROGLYCERINE
• Structural Properties of Li_xMn_2O_4 as Investigated by Molecular Dynamics and Density Functional Theory
• Periodic Boundary Quantum Chemical Study on ZnO Ultra-Violet Laser Emitting Materials
• Periodic Boundary Quantum Chemical Study on ZnO Ultra-Violet Laser Emitting Materials
• Mechanism of Layer-by-Layer Homoepitaxial Growth of SrTiO_3 (100) as Investigated by Molecular Dynamics and Computer Graphics
• Development of New Kinetic Monte Carlo Simulator for Theoretical Design of MgO Protecting Layer in Plasma Display
• Theoretical Calculations on Electronic Structure and Catalytic Reaction of Organo-f-element Complexes
• Right Lung Cancer with Right Aortic Arch
• Potential Energy Surface and Dynamics of Pd/MgO(001)System as Investigated by Periodic Density Functional Calculations and Classical Molecular Dynamics Simulations
• Investigation of Thermal Annealing Process of GaN Layer on Sapphire by Molecular Dynamics
• Investigation of Initial Growth Process of GaN Film on Sapphire Using Computational Chemistry
• Investigation of Growth Process of GaN Film on Sapphire by Computational Chemistry
• Computational Studies on GaN Surface Polarity and InN/GaN Heterostructures by Density Functional Theory and Molecular Dynamics
• Study on Surface Polarity of GaN by Density Functional Theory and Molecular Dynamics
• Atomistic Crystal Growth Process of Metal Oxide Electronics Materials : Theoretical Simulation Studies
• Quantum Chemical Calculations of Sulfur Doping Reactions in Diamond CVD
• Molecular Orbital Calculations of Sulfur Doping Reactions in Diamond CVD
• Computational Chemistry Study on Initial Stages of Nitridation of Silicon Surfaces
• Molecular Dynamics Simulations of Adhesional Forces via Hydrocarbon Films
• Nonlinear Susceptibility of Second Harmonic Generation Corresponded to the Diamond(100)Surface Structures
• Development of New Tight-Binding Molecular Dynamics Program to Simulate Chemical-Mechanical Polishing Processes
• Development of New Tight-Binding Molecular Dynamics Program to Simulate Chemical-Mechanical Polishing Processes
• Theoretical Simulation of Dielectric Breakdown by Molecular Dynamics and Tight-Binding Quantum Chemistry Methods
• Theoretical Investigation of Electrical and Electronic Properties of Carbon Materials
• Investigation of the Electrical and Electronic Properties of Semiconductor Oxide Gas Sensors by Tight-Binding Quantum Calculations
• Theoretical investigation on the electronic properties of conjugated double and triple bond linear carbon chains
• Computational Chemistry Study on Crystal Growth of InGaN/GaN
• Computational Chemistry Study on Crystal Growth Process of InGaN/GaN
• Silicalite and Metallosilicate Surface Modeling and Density Functional Theory Studies of Surface Properties
• Molecular Orbital Approach to the Electronic Structure of CdS Ultrafine Particles
• Measurement of Thermal Diffusivity of Nonlinear Optical Polymer Thin Films Using Photoacoustic Method
• Unusual Growth of a Left Atrial Myxoma Complicated by a Secundum Atrial Septal Defect
• Simulations of the Effects of Tip Apex Geometries on Atomic Force Microscopy Images
• Effects of Atomic Arrangement at Tip Apex and Tip-Sample Distance on Atomic Force Microscopy Images: A Simulation Study
• Molecular Adsorption on Ultrafine Precious Metal Particles Studied by Density Functional Calculation
• A Case of Trigeminal Neuralgia and Neurogenic Hypertension Due to Megadolichobasilar Artery Anomaly
• Simulation of Atomic Force Microscopy Image Variations along the Surface Normal:Presence of Possible Resolution Limit in the Attractive Force Range
• Molecular Dynamics Studies of Surface Difference Effect on Gas Separation by Zeolite Membranes

もっと見る 閉じる

スポンサーリンク