Computational Chemistry Study on Initial Stages of Nitridation of Silicon Surfaces

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2000-07-30

著者

• ZHOU Hui

  Department of Radiology & Public Health, Soochow University

• Miyamoto A

  New Ind. Creation Hatchery Center Tohoku Univ.

• MIYAMOTO Akira

  Department of Applied Chemistry, Graduate School of Engineering, Tohoku University

• Kubo Momoji

  Department Of Molecular Chemistry And Engineering Tohoku University

• Kubo Momoji

  Department Of Applied Chemistry Graduate School Of Engineering Tohoku University

• Tamura H

  R&d Center Kasado Administrative Division Power & Industrial Systems Hitachi Ltd.

• Zhou Hui

  Department Of Materials Chemistry Graduate School Of Engineering Tohoku University

• TAMURA Hiroyuki

  Department of Internal Medicine, Tokyo Medical and Dental Univeristy School of Medicine

• Takami S

  Corporate Manufacturing Engineering Center Toshiba Corporation

• Zhou H

  Department Of Materials Chemistry Graduate School Of Engineering Tohoku University

• TAKAMI Seiichi

  Department of Materials Chemistry, Graduate School of Engineering, Tohoku University

• Miyamoto Akira

  Department Of Applied Chemistry Graduate School Of Engineering Tohoku University

• Takami Seiichi

  Department Of Chemical System Engineering Faculty Of Engineering The University Of Tokyo

• Tamura H

  Department Of Computer Science And Electronics Kyushu Institute Of Technology

• Tamura Hitomi

  Network Design Research Center Kyushu Institute Of Technology

• Tamura Hitoshi

  Mechanical Engineering Research Laboratory Hitachi Ltd.

• Tamura Hideki

  Faculty Of Eng. Yamagata Univ.

• Zhou Hui

  Department Of Biochemistry And National Key Laboratory Of Pharmaceutical Biotechnology Nanjing Unive

• Tamura Hiroyuki

  Department Of Internal Medicine Tokyo Medical And Dental Univeristy School Of Medicine

• Tamura Hiroyuki

  Department Of Applied Physics Tohoku University

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