Development of New Tight-Binding Molecular Dynamics Program to Simulate Chemical-Mechanical Polishing Processes

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2002-04-30

著者

• Miyamoto A

  New Ind. Creation Hatchery Center Tohoku Univ.

• MIYAMOTO Akira

  Department of Applied Chemistry, Graduate School of Engineering, Tohoku University

• Kubo Momoji

  Department Of Molecular Chemistry And Engineering Tohoku University

• Kubo Momoji

  Department Of Applied Chemistry Graduate School Of Engineering Tohoku University

• KUROKAWA Hisayoshi

  Department of Electrical and Electronic Engineering, Ehime University

• Takami S

  Corporate Manufacturing Engineering Center Toshiba Corporation

• TAKAMI Seiichi

  Department of Materials Chemistry, Graduate School of Engineering, Tohoku University

• IMAMURA Akira

  Department of General Education, Faculty of Engineering, Hiroshima Kokusai Gakuin University

• YOKOSUKA Toshiyuki

  Department of Materials Chemistry, Graduate School of Engineering, Tohoku University

• KUROKAWA Hitoshi

  Department of Materials Chemistry, Graduate School of Engineering, Tohoku University

• Kurokawa Hisayoshi

  Department Of Electrical And Electronic Engineering Ehime University

• Miyamoto Akira

  Department Of Applied Chemistry Graduate School Of Engineering Tohoku University

• Takami Seiichi

  Department Of Chemical System Engineering Faculty Of Engineering The University Of Tokyo

• Imamura Akira

  Department Of General Education Faculty Of Engineering Hiroshima Kokusai Gakuin University

• Imamura Akira

  Department Of Mathematics Faculty Of Engineering Hiroshima Kokusai Gakuin University

• Imamura A

  Department Of Mathematics Faculty Of Engineering Hiroshima Kokusai Gakuin University

• Kurokawa H

  Department Of Electrical And Electronic Engineering Ehime University

• Imamura Akira

  Department Of Electronic Engineering Graduate School Of Engineering The University Of Tokyo

• Yokosuka Toshiyuki

  Department Of Materials Chemistry Graduate School Of Engineering Tohoku University

• Imamura Akira

  Department of Chemistry, Faculty of Science, Hiroshima University

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