Characterization of Amorphous Carbon Films Prepared by Photo-Enhanced Chemical Vapor Deposition at Low Temperatures

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1990-02-20

著者

• Yasuda Tetsuji

  Department Of Chemical Engineering University Of Tokyo

• Yasuda Tetsuji

  Department Of Chemical Engineering Faculty Of Engineering The University Of Tokyo

• KOMIYAMA Hiroshi

  Department of Chemical System Engineering, The University of Tokyo

• Komiyama H

  Department Of Chemical System Engineering School Of Engineering University Of Tokyo

• Komiyama Hiroshi

  Department Of Chemical Engineering Faculty Of Engineering University Of Tokyo

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