Elementary Surface Reaction Simulation of Aluminum Chemical Vapor Deposition from Dimethylaluminumhydride Based on Ab Initio Calculations : Theoretical Process Optimization Procedure(2)
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2000-12-15
著者
-
EGASHIRA Yasuyuki
Graduate School of Engineering Science, Osaka University
-
TANAKA Takeo
Department of Medicine and Clinical Sciences, Yamaguchi University Graduate School of Medicine
-
Itoh Hisayoshi
Institute Of Materials Science University Of Tsukuba
-
Nakajima T
Univ. Tokyo Tokyo
-
Nakajima Tohru
Departments Of Pediatric Cardiology Osaka Medical Center And Research Institute For Maternal And Chi
-
Itoh H
Semiconductor Academic Research Center
-
SHIMOGAKI Yukihiro
Department of Materials Engineering, The University of Tokyo
-
SUGIYAMA Masakazu
Department of Electronic Engineering, School of Engineering, University of Tokyo
-
Nakajima Tohru
Department Of Chemical System Engineering School Of Engineering University Of Tokyo
-
Itoh Hitoshi
Semiconductor Academic Research Center
-
EGASHIRA Yasuyuki
Department of Chemical Engineering, Osaka University
-
Sugiyama Masaaki
R & D Laboratories-i Central R & D Bureau Nippon Steel Cotporation
-
Sugiyama Masaaki
Advanced Materials & Technology Research Laboratories Nippon Steel Corporation
-
Egashira Yasuyuki
Graduate School Of Engineering Science Osaka University
-
Egashira Yasuyuki
Department Of Chemical Engineering Graduate School Of Engineering Science Osaka University
-
Sugiyama M
Department Of Electric Engineering And Information Systems School Of Engineering The University Of T
-
Sugiyama Munehiro
Ntt Interdisciplinary Research Laboratories
-
KOMIYAMA Hiroshi
Department of Chemical System Engineering, The University of Tokyo
-
AOYAMA Jyun-ichi
Semiconductor Academic Research Center
-
YAMASHITA Kohichi
Department of Chemical System Engineering, School of Engineering, University of Tokyo
-
Tanaka Takeo
Department Of Chemical System Engineering School Of Engineering University Of Tokyo
-
Sugiyama M
Institute Of Engineering Innovation School Of Engineering The University Of Tokyo
-
Shimogaki Yukihiro
Department Of Materials Engineering Faculty Of Engineering Univerity Of Tokyo
-
Sugiyama Masakazu
Department Of Biotechnology Graduate School Of Agriculture And Life Sciences The University Of Tokyo
-
Komiyama H
Department Of Chemical System Engineering School Of Engineering University Of Tokyo
-
Komiyama Hiroshi
Department Of Chemical Engineering Faculty Of Engineering University Of Tokyo
-
Shimogaki Y
Department Of Materials Engineering School Of Engineering The University Of Tokyo
-
Nakajima Tohru
Department Of Chemical System Engineering Graduate School Of Engineering University Of Tokyo
-
Yamashita Kohichi
Department Of Chemical System Engineering School Of Engineering University Of Tokyo
-
Shimogaki Yukihiro
Department of Electronic Engineering, University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113, Japan
-
Shimogaki Yukihiro
Department of Chemical System Engineering, Faculty of Engineering, University of Tokyo,
-
SHIMOGAKI YUKIHIRO
Department of Chemical Engineering, University of Tokyo
関連論文
- Woody Biomass Production by Utilizing Coppice of Eucalyptus camaldulensis in an Arid Area in Western Australia
- Impact of intraoperative transesophageal echocardiography in cardiac and thoracic aortic surgery : Experience in 1011 cases
- PJ-628 Noninvasive Assessment of Elevated Left Ventricular End-diastolic Pressure by Temporal Analysis with Onsets of Transmitral Inflow and Mitral Annular Velocity(PJ105,Echo/Doppler (Others) 2 (I),Poster Session (Japanese),The 73rd Annual Scientific Mee
- PJ-057 Quantitative Analysis of Left Ventricular Septal Flash and Shuffle Motion by Curved Color M-mode in Patients with Left Bundle-branch Block(PJ010,Echo/Doppler (New Technology) 2 (I),Poster Session (Japanese),The 73rd Annual Scientific Meeting of The
- Cardiac Resynchronization Therapy Improves Left Ventricular Diastolic Synchronicity and Function(Echo/Doppler 10 (I), The 69th Annual Scientific Meeting of the Japanese Circulation Society)
- DPJ-026 Association between Untwisting and Non-uniformity of Apex-to-Basal Lengthening before Left Ventricular Filling in Patients with Hypertrophic Cardiomyopathy(DPJ05,Echo/Doppler (Myocardium) (I),Digital Poster Session (Japanese),The 73rd Annual Scien
- 5 Utility of Visualization of Pre-ejection Septal Flash and Shuffle by Curved Color M-mode for Predicting Outcome after Cardiac Resynchronization Therapy(Frontiers in Diagnostic Echocardiography,Symposium 14 (SY-14) (M),The 73rd Annual Scientific Meeting
- PJ-684 Importance of Apical Rotation for Improvement of Left Ventricular Contractile Function during Inotropic Stimulation in Patients with Dilated Cardiomyopathy(Echo / Doppler(17)(I),Poster Session(Japanese),The 72nd Annual Scientific Meeting of the Jap
- PJ-551 Acute effect of sequential pneumatic foot compression on peripheral arterial circulation in lower extremity(Peripheral circulation/Vascular disease(08)(H),Poster Session(Japanese),The 72nd Annual Scientific Meeting of the Japanese Circulation Socie
- PJ-292 Apex-to-Base Dispersion in Regional Timing of Left Ventricular Radial Lengthening : Comparison of Normal Subject with Hypertrophic Cardiomyopathy(Echo/Doppler(13)(I),Poster Session(Japanese),The 72nd Annual Scientific Meeting of the Japanese Circul
- OJ-251 Combined Analysis with Time Difference and Velocity Ratio of Transmitral Inflow and Mitral Annular Motion in Patients with Atrial Fibrillation(Echo / Doppler(04)(I),Oral Presentation (Japanese),The 72nd Annual Scientific Meeting of the Japanese Cir
- OJ-165 Effects of sequential pneumatic foot compression on deep venous and cardiac hemodynamics(Thromboembolism / Antithrombotic therapy / Thrombolysis(02)(H),Oral Presentation (Japanese),The 72nd Annual Scientific Meeting of the Japanese Circulation Soci
- 5 Real-Time Three-Dimensional Transesophageal Echo Imaging Using a Novel Miniaturized Matrix Array Transducer(Symposium 15 (SY-15) (I) New Trends in Echocardiography,Special Program,The 72nd Annual Scientific Meeting of the Japanese Circulation Society)
- PJ-101 Maturational Modulation of Right Ventricular Longitudinal and Radial Strain : Comparison with Left Ventricle using Two Dimensional Tissue Tracking System(Echo/Doppler-14, The 71st Annual Scientific Meeting of the Japanese Circulation Society)
- PJ-099 Temporal Disparity between Mitral Annular Motion and Transmitral Inflow in Patients with Diastolic Dysfunction Evaluated by Two-Dimensional Tissue Tracking System(Echo/Doppler-14, The 71st Annual Scientific Meeting of the Japanese Circulation Socie
- PJ-097 Transmural Gradient of Left Ventricular Systolic Torsion in Patients with Left Ventricular Hypertrophy(Echo/Doppler-14, The 71st Annual Scientific Meeting of the Japanese Circulation Society)
- PJ-095 Transmural Torsional Deformation in Hypertrophic Cardiomyopathy : Temporal and Spatial Analysis by Two-Dimensional Tissue Tracking System(Echo/Doppler-13, The 71st Annual Scientific Meeting of the Japanese Circulation Society)
- OJ-075 Temporal Disparity in Mitral Annular Velocity and Transmitral Inflow in Patients with Atrial Fibrillation : Analysis by Dual Doppler System(Echo / Doppler-04, The 71st Annual Scientific Meeting of the Japanese Circulation Society)
- Deposition of Cu-Ag Alloy Film by Supercritical Fluid Deposition
- Surface Reaction Kinetics in Metalorganic Vapor Phase Epitaxy of GaAs through Analyses of Growth Rate Profile in Wide-Gap Selective-Area Growth
- Comparison of Organic and Hydride Group V Precursors in Terms of Surface Kinetics in Wide-Gap Selective Area Metalorganic Vapor Phase Epitaxy
- Monolithically Integrated InGaN-Based Multicolor Light-Emitting Diodes Fabricated by Wide-Stripe Selective Area Metal-Organic Vapor Phase Epitaxy
- Atomic Migration of Metals in the Interfaces of Au-Si and Ni-Si for Crystalline and Amorphous Si Observed by 40 MeV-O^ Ion Backscattering
- Intersubband Transition at 1.52μm in GaN/AlN Multiple Quantum Wells Grown by Metal Organic Vapor Phase Epitaxy
- Fabrication of Abrupt AlN/GaN Multi Quantum Wells by Low Temperature Metal Organic Vapor Phase Epitaxy
- PJ-337 Radial artery spasm is an important factor for the radial artery injury after transradial intervention (TRI) : An IVUS study(Peripheral Circulation/Vascular Disease 2(H) : PJ56)(Poster Session (Japanese))
- Electro- and Thermomigration of Metallic Islands on Si(100) Surface
- Determinant Effecting Intimal Thickening of Radial Artery in Patients with Coronary Artery Disease : An IVUS Study
- Predictors of Intima-Media Thickening in the Radial Artery after Transradial Intervention : An IVUS Study
- Ion-Induced Anger Electrons Emitted from MgO and GaP under Shadowing Conditions
- Anger Electron Emission under Jon-Beam Shadowing Conditions
- PJ-361 Left Ventricular Apical Initial Clockwise Rotation in Early Systole in Patients with Dilated Cardiomyopathy : Evaluation by Two-Dimensional Tissue Tracking System(Echo/Doppler-18, The 71st Annual Scientific Meeting of the Japanese Circulation Socie
- Ratio of Early Transmitral Velocity to Lateral Mitral Annular Early Diastolic Velocity Has the Best Correlation With Wedge Pressure Following Cardiac Surgery
- Effect of Partial Pressure of TiCl_4 and NH_3 on Chemical Vapor Deposition Titanium Nitride (CVD-TiN) Film Cl Content and Electrical Resistivity
- Large-Area MOVPE Growth of AlGaAs/GaAs Heterostructures for HEMT LSIs
- MOVPE Growth of AlGaAs /GaAs Heterostructures for HEMT LSI
- Basic data of research project on large scale afforestation of arid land for carbon fixation near Leonora in Western Australia (小特集 沙漠工学分科会)
- Development of Tree Growth Simulator Based on a Process Model of Photosynthesis for Eucalyptus Camaldulensis in Arid Land
- Development of Integrated Simulator of Water Transport and Plant Growth as an Evaluation Tool of Arid Land Afforestation for CO_2 Fixation
- Comparative Analysis between Biomass and Topographic Features in an Arid Land, Western Australia
- Restructuring and Afforestation of Hardpan Area to Sequester Carbon
- Multi-Wafer Growth of HEMT LSI Quality AlGaAs/GaAs Heterostructures by MOCVD
- GaN-Based High-Speed Intersubband Optical Switches
- Mobility-Lifetime Product in Hydrogenated Amorphous Silicon
- Integrated Radiation Detectors with a-Si Photodiodes on Ceramic Scintillators
- Direct Observation of a-Si:H/a-Si_C_x:H Multilayers and Their Electrical Properties : Surfaces, Interfaces and Films
- Preparation of High Purity a-Si:H Films and Their Light Soaking Effects
- Electron Irradiation Effects on Electrical Properties of a Bi_Pb_Sr_2Ca_2Cu_3O_ Superconductor
- Electron Irradiation Effects on a Bi_Pb_Sr_2Ca_2Cu_3O_ Superconductor
- The impact of intermittent pneumatic compression devices on deep venous flow velocity in patients with congestive heart failure
- Examination of Surface Elementary Reaction Model for Chemical Vapor Deposition of Al Using In Situ Infrared Reflection Absorption Spectroscopy : Teoretical Optimization Procedure (3)
- Elementary Surface Reaction Simulation of Aluminum Chemical Vapor Deposition from Dimethylaluminumhydride Based on Ab Initio Calculations : Theoretical Process Optimization Procedure(2)
- Kinetics of GaAs Metalorganic Chemical Vapor Deposition Studied by Numerical Analysis Based on Experimental Reaction Data
- Reaction Analysis of Aluminum Chemical Vapor Deposition from Dimethyl-aluminum-hydride Using Tubular Reactor and Fourier-Transform Infrared Spectroscopy : Theoretical Process Optimization Procedure(1)
- Formation of Ordered Mesostructured Silica by Vapor Infiltration of Tetraethoxysilane into Hexagonally Arranged Surfactant-Catalyst Nanocomposites
- Ultrathin Silica Films with a Nanoporous Monolayer
- Short Cavity All-Solid-State Femtosecond Cr:LiSAF Laser
- Femtosecond Pulse Delivery through Long Multimode Fiber Using Adaptive Pulse Synthesis
- Effect of Underlayers on the Morphology and Orientation of Aluminum Films Prepared by Chemical Vapor Deposition Using Dimethylaluminumhydride
- Transform-Limited 30-fs Pulse Generation from a Diode-Pumped Kerr-Lens Mode-Locked Cr:LiSAF Laser
- Compact Diode-Pumped Cr^3+:LiSrAlF_6 Femtosecond Laser
- Ion Irradiation Effect on Ba_2YCu_3O_7 Superconductor
- Electron Irradiation Effects on a Ba_2YCu_3O_7 Superconductor : Electrical Properties of Condensed Matter
- Nondestructive Measurement of Minority Carrier Lifetimes in Si Wafers Using Frequency Dependence of ac Photovoltages
- Measurement of Minority Carrier Lifetimes using AC Photovoltages Excited by Two Photon Beams of Different Wavelengths
- A Non-Destructive Method for Measuring Lifetimes for Minority Carriers in Semiconductor Wafers Using Frequency-Dependent ac Photovoltages
- Characteristics of Silicon Solar Cells Fabricated by Non-Mass-Analyzed Ion Implantation : I-1: SILICON SOLAR CELLS (1) : Ion Implantation & Radiation damage
- A Photovoltaic Method for Evaluating Junction Characteristics Using Cut-Off Frequency
- Silicon Solar Cells Fabricated by a New Ion Implantation Concept : I-2: SINGLE CRYSTAL SILICON SOLAR CELLS
- Characterization of 3-Inch Solar Cells Fabricated from Granular Silicon Obtained in a Fluidized-Bed Reactor : I-1: POLYCRISTALLINE SILICON SOLAR CELLS
- Impurity Gettering of Diffused Solar Cells Fabricated from Metallurgical-Grade Silicon : I-1: SILICON SOLAR CELLS (I)
- Efficient Solar Cells from Metallurgical-Grade Silicon : B-6: SOLAR CELLS AND AMORPHOUS DEVICES
- Eptitaxial Solar Cells on Refined Metallurgical-Grade Silicon : B-1: AMORPHOUS SILICON AND SOLAR CELLS
- Reconfirmation of a previously reported de novo case of partial 7q trisomy by means of whole chromosome painting
- Numerical Prediction of Water Movement in Western Australian Soil For A Large Scale Afforestation (Proceedings of the International Conference on DESERT TECHNOLOGY 5)
- Deposition of wsi_x Films from Preactivated Mixture of WF_6/SiH_4
- Electrical and Thermal Stability Characteristics of HfCN Films as Metal Gate-Electrode Synthesized by Metalorganic Chemical Vapor Deposition
- High Temperature Annealing-Induced Phase Transformation Characteristic of Nitrogen-Rich Hafnium Nitride Films
- Physical and Electrical Characteristics of HfN Metal Gate Electrode Synthesized by Post-Rapid Thermal Annealing-assisted MOCVD
- Fabrication of Hf(C)N Films on SiO_2 by Metal Organic Chemical Vapor Deposition (MOCVD) Using TDEAHf Precursor
- The Fabrication of Hafnium Nitride by Metal Organic Chemical Vapor Deposition (MOCVD) Using TDEAHf Precursor for Gate-Electrode Application
- Pore Modification of Anodic Alumina Membrane by Position-Controlled CVD Using Catalytic Reaction
- Preparation of Amorphous Fluorinated Carbon Film Using Low Global-Warming Potential Gas, C_4F_6, by Plasma Enhanced Chemical Vapor Deposition
- Improvement of TiN Flow Modulation Chemical Vapor Deposition from TiCl_4 and NH_3 by Introducing Ar Purge Time
- Successful Transcatheter Coil Embolization of Coronary Artery to Left Ventricular Fistula Associated With Absent Pulmonary Valve With Tricuspid Atresia in Early Infancy
- Idiopathic arterial calcification in infancy with twin-twin transfusion syndrome
- Chemical Bonding States and Band Alignment of Ultrathin AlOxNy/Si Gate Stacks Grown by Metalorganic Chemical Vapor Deposition
- Signal Transduction Pathways through TRK-A and TRK-B Receptors in Human Neuroblastoma Cells
- Study on Adsorption and Desorption Mechanisms at the Interface on the Basis of Experimental Data of Bubble Coalescence Time
- Synthesis of Partially Carbonized Polyimide Membranes with High Resistance to Moisture
- Partially Carbonized Polyimide Membranes with High Permeability for Air Separation
- Zirconium-Containing Mesoporous Silica with High Alkaline Resistance
- Decrease in Deposition Rate and Improvement of Step Coverage by CF_4 Addition to Plasma-Enhanced Chemical Vapor Deposition of Silicon Oxide Films
- Preparation of Low-Dielectric-Constant F-Doped SiO2 Films by Plasma-Enhanced Chemical Vapor Deposition
- Preparation of Low Dielectric Constant F-Doped SiO_2 Films by PECVD
- Step Coverage Analysis for Hexamethyldisiloxane and Ozone Atmospheric Pressure Chemical Vapor Deposition
- Optimization of soil structure for tree growth by hardpan blasting in an arid region in Western Australia (Special: 14th Asian symposium on ecotechnology)
- Kinetic Study of CVD Reaction by Area-Controlled CVD
- Area-Controlled CVD Using Catalytic Reaction
- Model for a Quartz-Crystal Tuning Fork Using Torsion Spring at the Joint of the Arm and the Base and Analysis of Its Frequency