Nondestructive Measurement of Minority Carrier Lifetimes in Si Wafers Using Frequency Dependence of ac Photovoltages

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1986-05-20

著者

• Itoh Hisayoshi

  Institute Of Materials Science University Of Tsukuba

• Itoh H

  Semiconductor Academic Research Center

• HONMA Noriaki

  Central Research Laboratory, Hitachi, Ltd.

• MUNAKATA Chusuke

  Central Research Laboratory, Hitachi, Ltd.

• WARABISAKO Terunori

  Central Research Laboratory

• Itoh Hitoshi

  Semiconductor Academic Research Center

• Honma N

  Central Research Laboratory Hitachi Ltd.

• Honma Noriaki

  Central Research Laboratory Hitachi Lid.

• ITOH Haruo

  Central Research Laboratory, Hitachi Lid.

• Munakata C

  Tohoku Inst. Technol. Sendai Jpn

• Munakata Chusuke

  Central Research Laboratory Hitachi Lid.

• Itoh Haruo

  Central Research Laboratory Hitachi Ltd.

• Warabisako Terunori

  Central Research Laboratory Hitachi Lid.

• Munakata Chusuke

  Central Res. Lab. Hitachi Ltd.

関連論文

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• Observation of Ring-Distributed Microdefects in Czochralski-Grown Silicon Wafers with a Scanning Photon Microscope and Its Diagnostic Application to Device Processing
• Comparison of Minority Carrier Lifetimes Measured by Photoconductive Decay and ac Photovoltaic Method : Techniques, Instrumentations and Measurement
• Nondestructive Observations of Surface Flaws and Contaminations in Silicon Wafers by Means of a Scanning Photon Microscope : Semiconductors and Semiconductor Devices
• Calibration of Minority Carrier Lifetimes Measured with an ac Photovoltaic Method : Techniques, Instrumentations and Measurement
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