A Scanning Electron Microscopic Method of Obtaining Electric Field Distributions Using Solid-State Models
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概要
- 論文の詳細を見る
Al-electrodes are evaporated upon a 5Ωcm p-type Si wafer to make solid-state models for a triode, a hairpin-type electron gun, and a pair of electrodes. Each model is 0.3 mm thick, 4 mm square, and mounted on a TO-5 header. Each model is irradiated with an electron beam pulsed at a 100 kHz rate whose energy, current and diameter were 22 keV, a few nA and about 1 μm, respectively. Scanning electron microscopic images of the electric field distribution are obtained by using the β-conductive signal under various biasing conditions of the models to demonstrate the validity of the present method. The results were, however, disturbed by an abnormal edge effect due to the evaporated metal-electrode.
- 社団法人応用物理学会の論文
- 1971-06-05
著者
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Munakata Chusuke
Central Res. Lab. Hitachi Ltd.
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MUNAKATA Chusuke
Central Research Laboratory, Hitachi Ltd.
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