Observation of Ring-Distributed Microdefects in Czochralski-Grown Silicon Wafers with a Scanning Photon Microscope and Its Diagnostic Application to Device Processing
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1992-06-15
著者
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Shimizu H
Nihon Kesso Koogaku Co. Ltd. Gunma Jpn
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HONMA Noriaki
Central Research Laboratory, Hitachi, Ltd.
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SHIMIZU Hirofumi
Semiconductor Design & Development Center, Hitachi, Ltd.
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MUNAKATA Chusuke
Central Research Laboratory, Hitachi, Ltd.
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AOKI Shigeru
Central Research Laboratry, Hitachi Ltd.
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KOSAKA Yuji
Semiconductor Design & Development Center, Hitachi, Ltd.
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Shimizu H
National Inst. Materials And Chemical Res. Ibaraki Jpn
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Shimizu Hirofumi
High-technology Research Center And Faculty Of Engineering Kansai University
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Shimizu Hirofumi
Semiconductor And Integrated Circuits Division Hitachi Ltd.
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Shimizu H
High-technology Research Center And Faculty Of Engineering Kansai University
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Kosaka Yuji
Semiconductor Design & Development Center Hitachi Ltd.
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Honma N
Central Research Laboratory Hitachi Ltd.
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Honma Noriaki
Central Research Laboratory Hitachi Lid.
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Munakata C
Tohoku Inst. Technol. Sendai Jpn
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Munakata Chusuke
Central Research Laboratory Hitachi Lid.
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Shimizu Hideaki
Department Of Reaction Chemistry Faculty Of Engineering The University Of Tokyo
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Shimizu Hirofumi
Semiconductor & Integrated Circuits Division Hitachi Lid.
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Aoki Shigeru
Central Research Laboratory Hitachi Ltd.
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Aoki Shigeru
Central Research Laboratry Hitachi Ltd.
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Munakata Chusuke
Central Res. Lab. Hitachi Ltd.
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