A New Ion Counting System Devised for Mass-Selective Detection of Sputtered Neutrals in Laser SNMS
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1990-07-20
著者
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Shimizu H
Nihon Kesso Koogaku Co. Ltd. Gunma Jpn
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Ichimura S
National Inst. Advanced Industrial Sci. And Technol.(aist) Ibaraki Jpn
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Shimizu H
National Inst. Materials And Chemical Res. Ibaraki Jpn
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ICHIMURA Shingo
Electrotechnical Laboratory, Umezono
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KOKUBUN Kiyohide
Electrotechnical Laboratory, Umezono
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SHIMIZU Hazime
Electrotechnical Laboratory, Umezono
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GOTO Keisuke
Nagoya Institute of Technology
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MATSUURA Shigeki
Hamamatsu Photonics, K. K.
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Shimizu Hirofumi
High-technology Research Center And Faculty Of Engineering Kansai University
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Shimizu Hirofumi
Semiconductor And Integrated Circuits Division Hitachi Ltd.
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Shimizu H
High-technology Research Center And Faculty Of Engineering Kansai University
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Ichimura Shingo
Electrotechnical Laboratory
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Shimizu Hazime
Electrotechnical Laboratory
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Kokubun Kiyohide
Electrotechnical Laboratory Umezono
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Matsuura S
Hamamatsu Photonics K. K.
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KOKUBUN Kiyohide
Electrotechnical Laboratory
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