Lithography Experiments using Synchrotron Radiation from ETL Storage Ring
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概要
- 論文の詳細を見る
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 1983-04-20
著者
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Atoda Nobufumi
Electrotechnical Laboratory
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Onuki Hideo
Electrotechnical Laboratory
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TANINO Hiroshi
Electrotechnical Laboratory
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Ichimura Shingo
Electrotechnical Laboratory
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Hoh Koichiro
Electrotechnical Laboratory
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HIRATA Masahiro
Electrotechnical Laboratory
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Tanino Hiroshi
Electrotechnical Laboratory, Sakura-mura, Ibaraki 305, Japan
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Hoh Koichiro
Electrotechnical Laboratory, Sakura-mura, Ibaraki 305, Japan
関連論文
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- Ultraviolet Photoemission Study of Perovskite Fluorides KMF_3(M: Mn, Fe, Co, Ni, Cu, Zn) in the Valence Band Region
- X-Ray Photoemission Study of the Band Structure of KMF_3 (M: Mn, Fe, Co, Ni, Cu, Zn) Crystals
- Multiplet Structures in XPS Spectra of 3p and 3s Subshells of Magnetic Ions in Perovskite Fluorides
- Sensitivity of Ion-Imaging Method and Mass Analysis using an Imaging Detector
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- Pressure Measurement in XHV Region Using Nonresonant Multiphoton Ionization by Picosecond Pulsed Laser
- Excimer Laser Ablation of Cryogenic NO_2 Films
- Preliminary Pressure Measurement in the Range of 10^ Pa Using a Picosecond Pulsed Laser
- Nonresonant Multiphoton Ionization of H_2, CO and CO_2 by Second Harmonics of Picosecond YAG Laser
- Measurement of Extreme-High-Vacuum Pressure by Laser Ionization
- Multiphoton Ionization of Xe and Kr Atoms by an ArF Excimer Laser
- A New Ion Counting System Devised for Mass-Selective Detection of Sputtered Neutrals in Laser SNMS
- Nonresonant Multiphoton Ionization of He and Ne Atoms
- Dependence of the Nonresonant Laser Ionization of Rare Gases on Laser Wavelength
- Detection of Sputtered Neutral Atoms by Nonresonant Multiphoton Ionization : Surfaces, Interfaces and Films
- Preliminary Results of Vacuum Pressure Measurement by Laser Ionization Method
- X-Ray Study of Compressibilities of β-(BEDT-TTF)_2I_3 under Hydrostatic Pressure
- The Resistivity Measurements of HgBa_2Ca_2Cu_3O_ and HgBa_2Ca_3Cu_4O_ Superconductors under High Pressure
- Annealing Behavior of Irradiation-Induced Damagein an AlGaAs/GaAs Heterostructure by Low-Ertergy Electron Beam
- Search for asymmetric reaction of amino acids by circularly polarized radiationusing a polarizing undulator at theElectrotechnical Laboratory
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- Comparison of the Counting Efficiencies of an Imaging Counter and Electric-pulse Counter
- Preliminary Measurement of H_2 Pressure through Detection of Photoelectrons in Vacuum Range from 10^ to 10^ Pa
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- X-Ray Photoelectron Spectroscopy (XPS) Analysis of Oxide Formation on Silicon with High-Purity Ozone
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- Lithography Experiments Using Synchrotron Radiation from ETL Storage Ring : LATE NEWS
- Photoabsorption Spectra of Si(CH_3O)_4, Si(CH_3O)_2(C_6H_5)_2, Si(C_2H_5O)_4, Ti(i-C_3H_7O), and BCl_3 in the Region of 6-9.6 eV
- Spectral Flux Measurements of Synchrotron Radiation from the INS Machine in the Visible Region
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- Photoelectric Yield Spectra of Perovskite Fluorides; KMnF_3 and KZnF_3
- XUV Absorption Spectra of Sb Metal and BiSb Alloys : X-RAY AND XUV ABSORPTION SPECTRA
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- Summary Abstract
- A Method to Compensate Decay of Power in SR Lithography
- Lithography Experiments using Synchrotron Radiation from ETL Storage Ring