Synergistic Enhancement of Direct Synchrotron Radiation Etching of a Resist by a Low-Energy Oxygen Beam

スポンサーリンク

概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1987-11-20

著者

• Kudo Isao

  Electrotechnical Laboratory

• Atoda N

  Electrotechnical Lab. Ibaraki

• Atoda Nobufumi

  Electrotechnical Laboratory

• ICHIMURA Shingo

  Electrotechnical Laboratory, Umezono

• SHIMIZU Hazime

  Electrotechnical Laboratory, Umezono

• MURAKAMI Hiroshi

  Electrotechnical Laboratory

• Ichimura Shingo

  Electrotechnical Laboratory

• Shimizu Hazime

  Electrotechnical Laboratory

関連論文

• Depletion of Copper from the Grain Boundary Region of Copper-Nickel Alloys during Sputtering at Elevated Temperatures
• Sensitivity of Ion-Imaging Method and Mass Analysis using an Imaging Detector
• Direct Estimation of the Ionization Region for XHV Measurement by Laser Ionization
• Pressure Measurement by Photoelectron Counting
• Pressure Measurement in XHV Region Using Nonresonant Multiphoton Ionization by Picosecond Pulsed Laser
• Excimer Laser Ablation of Cryogenic NO_2 Films
• Preliminary Pressure Measurement in the Range of 10^ Pa Using a Picosecond Pulsed Laser
• Nonresonant Multiphoton Ionization of H_2, CO and CO_2 by Second Harmonics of Picosecond YAG Laser
• Measurement of Extreme-High-Vacuum Pressure by Laser Ionization
• Multiphoton Ionization of Xe and Kr Atoms by an ArF Excimer Laser
• A New Ion Counting System Devised for Mass-Selective Detection of Sputtered Neutrals in Laser SNMS
• Nonresonant Multiphoton Ionization of He and Ne Atoms
• Dependence of the Nonresonant Laser Ionization of Rare Gases on Laser Wavelength
• Detection of Sputtered Neutral Atoms by Nonresonant Multiphoton Ionization : Surfaces, Interfaces and Films
• Preliminary Results of Vacuum Pressure Measurement by Laser Ionization Method
• Nonlinear Optical Properties of Si(111)7×7 : Intensity Behavior of Second Harmonies from the Polarizations along [21^^-1^^-] and [011^^-] Axes
• Annealing Behavior of Irradiation-Induced Damagein an AlGaAs/GaAs Heterostructure by Low-Ertergy Electron Beam
• Effect of Atomic Force on the Surface Corrugation of 2H-NbSe_2 Observed by Scanning Tunneling Microscopy
• Observation of Atomic Image of 2H-NbSe_2 Surface by Scanning Tunneling Microscope
• A Method to Compensate Decay of Power in SR Lithography : Lithography Technology
• Laser Etching of Bi-Sr-Ca-Cu-O Superconducting Thin Films
• Hyperthermal O_3 Beam Produced by Laser Ablation of Solid-Ozone Film
• Application of STM Nanometer-Size Oxidation Process to Planar-Type MIM Diode
• Comparison of the Counting Efficiencies of an Imaging Counter and Electric-pulse Counter
• Preliminary Measurement of H_2 Pressure through Detection of Photoelectrons in Vacuum Range from 10^ to 10^ Pa
• Large Area Exposure in Synchrotron Radiation Lithography Utilizing the Steering of the Electron Beam in the Storage Ring
• Gold Substrates for Scanning Tunneling Microscopy of Adsorbed Species
• Effects of Electron Irradiation on Two-Dimensional Electron Gas in AlGaAs/GaAs Heterostructure
• Focused Ion Beam Fabrication of Fine Metal Structures by Oxide Resists : Beam-Induced Physics and Chemistry
• Control of Levitation in Electromagnetic Levitators under Microgravity
• Focused Ion Beam Fabrication of Fine Metal Structures by Oxide Resists
• Synergistic Enhancement of Direct Synchrotron Radiation Etching of a Resist by a Low-Energy Oxygen Beam
• X-Ray Photoelectron Spectroscopy (XPS) Analysis of Oxide Formation on Silicon with High-Purity Ozone
• Mass- and Electron-Spectroscopic Observation of Resist Decomposition by Synchrotron Radiation
• Lithography Experiments Using Synchrotron Radiation from ETL Storage Ring : LATE NEWS
• SEPAC System Test in NASDA Space Chamber
• SEPAC System Test in NASDA Space Chamber
• Diagnostic Studies of SEPAC Test in NASDA Space Chamber
• SEPAC Particle Accelerator Test in NASDA Space Chamber
• Focused Ion Beam Lithography with Transition Metal Oxide Resists : Lithography Technology
• A New Method for Cleaning the Surface of Ultra High-Purity Iron by High-Purity Ozone Exposure and UV Irradiation
• Micro-probe Auger Analysis of Si Migration in Al Metallization for LSI : A-3: DEVICE TECHNOLOGY (III)
• Dose Rate Effect of the Preferential Sputtering of Copper-Nickel Alloys by Argon Ion at Elevated Temperatures
• Simultaneous Control Experiment of Orientation and Arm Position of Space Robot Using Drop Shaft
• Initial Oxidation of Si(100)2×1 by Ozone : Transition of Growth Kinetics from Adsorption to Ultrathin Film Growth
• Effect of Optical Breakdown on Second Harmonic Generation from Si(111)7×7 with Nd:YAG Laser
• Adsorption of Benzene on Si(111)7×7 at Room Temperature Observed by Second Harmonic Generation (SHG)
• Observation of Surface by Surface Electron Spectroscopic Tomography
• Focused Ion Beam Lithography with Transition Metal Oxide Resists
• Summary Abstract
• A Method to Compensate Decay of Power in SR Lithography
• Lithography Experiments using Synchrotron Radiation from ETL Storage Ring

もっと見る 閉じる

スポンサーリンク