Focused Ion Beam Fabrication of Fine Metal Structures by Oxide Resists : Beam-Induced Physics and Chemistry
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1991-01-31
著者
-
吉田 起國
京大院エネルギー科学
-
吉田 起國
京大原子エネルギー研
-
吉田 起國
京大原研
-
Wachi Hiroshi
Faculty Of Technokogy Tokyo University Of Agriculture And Technology
-
Atoda Nobufumi
Laboratory For Advanced Optical Technology National Institute Of Advanced Industrial Science And Tec
-
Atoda N
Sortec Ibaraki Jpn
-
Atoda Nobufumi
Electrotechnical Laboratory
-
KOSHIDA Nobuyoshi
Faculty of Technology, Tokyo University of Agriculture and Technology
-
Yamada K
Department Of Physics Tohoku University
-
Wachi Hiroshi
星薬科大学 臨床化学教室
-
Koshida Nobuyoshi
Faculty Of Technology Tokyo University Of Agriculture And Technology
-
Koshida Nobuyoshi
Department Of Electrical And Electronic Engineering Faculty Of Technology Tokyo University Of Agricu
-
Koshida Nobuyoshi
Division Of Electronic And Information Engineering Faculty Of Technology Tokyo University Of Agricul
-
KOMURO Masanori
Electrotechnical Laboratory
-
Komuro M
Mirai Advanced Semiconductor Research Center (asrc) National Institute Of Advanced Industrial Scienc
-
YOSHIDA Kazuyoshi
Faculty of Technology, Tokyo Univer.sity of Agriculture and Technology
-
Koshida N
Tokyo Univ. Agriculture And Technol. Tokyo Jpn
-
Wachi Hiroshi
Faculty Of Pharmaceutical Sciences Hoshi University
関連論文
- 高温超伝導体の磁束状態における熱輸送と準粒子散乱
- First Determination of the Inhibitor Complex Structure of Human Hematopoietic Prostaglandin D Synthase
- Incommensurate Lattice Distortion in the High Temperature Tetragonal Phase of La_(Sr,Ba)_xCuO_4(Condensed matter: electronic structure and electrical, magnetic, and optical properties)
- X-ray and Electron Diffraction Study of a Precipitation Phase in Nd_Ce_CuO_ Single Crystal(Condensed Matter : Electronic Structure, Electrical, Magnetic and Optical Properties)
- Preparation and Characterization of Ca^-free Methanol Dehydrogenase from Hyphomicrobium denitrificans A3151
- 25aSA-13 Ge-Sガラスの電子構造と局所構造
- Effect of Crystal Defects on Laser-Induced-Damage Tolerance of Organic Crystal, 4-Dimethylamino-N-methyl-4-stilbazolium Tosylate
- DC Superconducting Quantum Interference Device Utilizing the High T_c Step-Edge Junction
- EP-P36 Structural and functional characterization of glycerol kinase from the hyperthermophilic archaeon Thermococcus kodakaraensis KOD1(Section VII Enzyme and Protein Engineering)
- Proline Effect on the Thermostability and Slow Unfolding of a Hyperthermophilic Protein
- 2P-078 大腸菌由来pitrilysinの安定性解析(蛋白質・物性(2),第46回日本生物物理学会年会)
- Structural Basis for the Decarboxylation of Orotidine 5'-Monophosphate (OMP) by Plasmodium Falciparum OMP Decarboxylase
- Protein Thermostabilization Requires a Fine-tuned Placement of Surface-charged Residues
- Application of Femtosecond Laser Ablation for Detaching Grown Protein Crystals from Glass Capillary Tube(METHODS)
- 2P149 A novel supramolecular assembly and intermolecular electrontransfer process of Hyphomicrobium Cu-containing nitrite reductase(33. Redox enzyme,Poster Session,Abstract,Meeting Program of EABS & BSJ 2006)
- 3F11-3 Crystal structures of cavity-filling mutants of E. coli RNase HI
- 30pXF-10 イットリア安定化ジルコニアの時効による導電率低下メカニズム(超イオン伝導体)(領域5)
- 28aPS-2 Y-123の臨界電流に及ぼすCuサイトLi添加効果(領域8 ポスターセッション)(領域8)
- 21pTB-8 イットリア安定化ジルコニア導電率経時変化メカニズムに関する研究
- 22aPS-109 Pr-123 系における Sr 添加による相変化と伝導特性
- 22aPS-105 Y-123 の磁化緩和に及ぼす Li 添加効果
- 31aPS-71 Pr^ 添加硫化物ガラス発光特性のマトリックス依存性
- 20aYJ-12 ゲルマニウム・カルコゲナイドの電子構造と局所構造
- 20aYJ-11 Ge-S系アモルファス半導体の光学特性とギャップ内状態
- 18pPSA-26 YBCOの臨界電流にもたらすPrドープ効果
- 18pPSA-23 複合銅酸化物NdPrBaCuOとGdPrBaCuOにおける電流依存型負性抵抗
- 28pTC-6 アモルファスGe-Seの電子構造と局所構造
- 28pPSA-28 磁場中のYBCOにおける臨界電流のPr添加効果
- 28pPSA-22 GPBCOにおける不均質構造と電流依存性抵抗
- 25pL-6 Ge-S系アモルファス半導体の構造と価電子帯状態密度
- 23aPS-19 YBCO-PBCO系における希土類元素拡散過程とパーコレーション過程
- 24aPS-33 YBaCuO-PrBaCuO-YPrBaCuO混合系の構造と伝導特性
- 25pU-11 銅酸化物複合系YBaCuO-PrBaCuOにおけるパーコレーションの複合構造
- 28p-XF-9 銅酸化物YPrBaCuO系における超伝導経路とナノ構造パーコレーション過程
- 28p-PSA-48 YBaCuO-PrBaCuO複合系における希土類元素拡散と超伝導特性
- 26a-PS-17 Pr-YBCOにおけるクラスター構造と電流経路の挙動
- 30p-PSA-48 Y211-Bi2223系複合材料の輸送特性と臨界現象
- 7a-YE-12 Y211-Bi2223系複合材料の輸送現象とパーコレーション転移
- 30p-WE-5 Y211-Y123系複合材料の輸送現象とパーコレーション転移
- Ag-BPSCCO系複合材料の輸送現象と臨界指数
- Ag-BPSCCO複合材料の熱輸送とスケーリング理論
- 3a-PS-42 銀添加 Bi-2223試料の熱伝導率とパーコレーション転移
- Energy Spectrum of Spin Fluctuations in Superconducting La_Sr_xCuO_4(0.10≤x≤0.25) : Condensed Matter: Electronic Properties, etc.
- 31p-K-5 スピングラスを示すLa_Sr_CuO_4における磁気秩序
- Nondestructive Analysis and Control of Doping Rate in La_(Bi,Sr)_xCuO_
- Excess Oxygen Doping in Single Crystals of La_Bi_xCuO_ with or without Macroscopic Phase Separation
- Behavior of Percolation Clusters in Sintered Mixture of Niobium and Alumina : Condensed Matter
- Verification of the Model of Inductive Coupling between a Josephson Oscillator and a Stripline
- Modeling of Kinetic-Inductance Coplanar Stripline with NbN Thin Films
- Enlargement of Kinetic Inductance of NbN Superconducting Thin Films for Device Applications
- Relaxation Oscillators Made of YBaCuO Thin Films
- Evaluation of Temperature and Magnetic-Field Dependence of Pinning Potential of High T_c Superconductors from Flux-Creep Resistivity Experiments
- A New Anode-Electrode Structure for Sputter Deposition of High-Quality Y-Ba-Cu-O Thin Films
- Effect of Flux Creep on Current-Voltage Characteristics of Superconducting Y-Ba-Cu-O Thin Films
- Experimental Study of Noise Characteristics of Large-β dc SQUID with Resistively Shunted Inductance : Electrical Properties of Condensed Matter
- Spatial Distribution of Trapped Magnetic Flux in the High-T_c Superconductor Y_1Ba_2Cu_3O_. II. Comparison with the Critical State Model : Electrical Properties of Condensed Matter
- Conversion Efficiency of a Large-β DC-SQUID with a Resistively Shunted Inductance
- Effects of Kinetic Inductance on the Performance of a Flux-Flow-Type Josephson Amplifier
- Spatial Distribution of Trapped Magnetic Flux in the High T_c Superconductor Y_1Ba_2Cu_3O_
- Dependence of Magnetic Field Penetration Depth on Resistivity and Critical Temperature in c-Axis-Oriented YBaCuO Thin Films
- Relation between Pinning Potential and Critial Current Density of YBaCuO Superconducting Thin Films
- Characteristics of Interface-Modified Josephson Junctions Fabricated under Various Etching Conditions
- Interface-Treated Josephson Junctions in Trilayer Structures
- High-Performance a-SiGe Solar Cells Using a Super Chamber Method
- Magnetic and Microstructural Properties of Co-Cr Film Fabricated by Continuous Roll Coater : Magnetism, Magnetic Materials Devices
- Observation of Magnetization Structure on Co-Cr Perpendicular Magnetic Recording Media by Bitter and Electron Holography Methods
- Comparison of Microstructure of Cross-Sectional CoCr Thin Film Specimens Prepared by Fracture, Microtome, and Ion-Beam Thinning Methods
- EPR and AFMR of Bi_2CuO_4 in Submillimeter Wave Region
- Transient Light-Induced ESR Investigations of the Role of Hydrogen in the Stability of a-Si:H
- Irradiation-Temperature Dependence of the Light-Induced Effect in a-Si Solar Cells
- A New Type of Ultralight Flexible a-Si Solar Cell
- A Laser Welding and Scribing (LWS) Method for a High-Yield Integrated-Type a-Si Solar Cell
- Interference-Free Determination of the Optical Absorption Coefficient and the Optical Gap of Amorphous Silicon Thin Films
- Nambu-Hamiltonian Flows Associated with Discrete Maps (General)
- A Characterization of Discrete Time Soliton Equations
- 326 二相複合の連続体パーコレーション系における伝導度の臨界挙動
- Electrical Properties of Nanometer-Width Refractory Metal Lines Fabricated by Focused Ion Beam and Oxide Resists
- 50-nm Metal Line Fabrication by Focused Ion Beam and Oxide Resists : Focused Ion Beam Process
- 50-nm Metal Line Fabrication by Focused Ion Beam and Oxide Resists
- Focused Ion Beam Fabrication of Fine Metal Structures by Oxide Resists : Beam-Induced Physics and Chemistry
- Structural Effect on the Galvanomagnetic Properties of a Metal with Granular Inclusions
- 多相混合系における複合効果とパ-コレイション
- 27a-U-8 縦および横磁場中の補償金属における不均一電流の電流磁気効果
- パ-コレ-ション系における伝導現象--クラスタ-成長の臨界挙動と物性
- Focused Ion Beam Fabrication of Fine Metal Structures by Oxide Resists
- A New-Structure LiTaO_3 Pyroelectric Infrared Detector : FERROELECTRIC MATERIALS
- Percolative Conduction in a Composite System of Metal and Ceramics
- 金属-アルミナ混合系における誘電率と伝導度のパーコレーション的臨界挙動
- 多相材料の物性とパーコレーション現象
- 4a-N-10 Nb-Al_2O_3サーメットにおけるパーコレーション転移と伝導度の臨界挙動
- 238 二相混合焼結体における伝導度のパーコレイション転移(半導体・焼結体)
- 30p-T-5 ボイド含むインジウムの磁気抵抗
- 6a-H-3 Sbの負性抵抗
- 6a-H-2 Bi中における電磁波の異常な透過
- 3p-N-9 Bi中におけるdamped Alfven波の透過の異常性
- 7aQA-3 Ga_2S_3-GeS_2-La_2S_3-Pr_2S_3系ガラスの発光特性(過冷却液体・ガラス,領域12)
- 6pPSA-47 YBCOの臨界電流特性にもたらすBaサイト置換効果(高温超伝導,領域8)
- 25pWE-3 Ge-s系ガラスの吸収スペクトルと発光特性(25pWE 領域,領域10合同アモルファス,不純物・格子欠陥,領域4(半導体,メゾスコピック系・局在分野))
- 6pPSA-41 Nd-123系におけるPrとSrの添加効果と不均質構造(高温超伝導,領域8)
- 24pPSA-45 YBCOの臨界電流特性にもたらすCa+Pr共ドープ効果(24pPSA 理論・高温超伝導,領域8(強相関系分野-高温超伝導,強相関f電子系など))