Ichimura Shingo | Electrotechnical Laboratory

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概要

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著作論文

Sensitivity of Ion-Imaging Method and Mass Analysis using an Imaging Detector
Direct Estimation of the Ionization Region for XHV Measurement by Laser Ionization
Pressure Measurement by Photoelectron Counting
Pressure Measurement in XHV Region Using Nonresonant Multiphoton Ionization by Picosecond Pulsed Laser
Excimer Laser Ablation of Cryogenic NO_2 Films
Preliminary Pressure Measurement in the Range of 10^ Pa Using a Picosecond Pulsed Laser
Nonresonant Multiphoton Ionization of H_2, CO and CO_2 by Second Harmonics of Picosecond YAG Laser
Measurement of Extreme-High-Vacuum Pressure by Laser Ionization
Multiphoton Ionization of Xe and Kr Atoms by an ArF Excimer Laser
A New Ion Counting System Devised for Mass-Selective Detection of Sputtered Neutrals in Laser SNMS
Nonresonant Multiphoton Ionization of He and Ne Atoms
Dependence of the Nonresonant Laser Ionization of Rare Gases on Laser Wavelength
Detection of Sputtered Neutral Atoms by Nonresonant Multiphoton Ionization : Surfaces, Interfaces and Films
Preliminary Results of Vacuum Pressure Measurement by Laser Ionization Method
Annealing Behavior of Irradiation-Induced Damagein an AlGaAs/GaAs Heterostructure by Low-Ertergy Electron Beam
Hyperthermal O_3 Beam Produced by Laser Ablation of Solid-Ozone Film
Application of STM Nanometer-Size Oxidation Process to Planar-Type MIM Diode
Comparison of the Counting Efficiencies of an Imaging Counter and Electric-pulse Counter
Preliminary Measurement of H_2 Pressure through Detection of Photoelectrons in Vacuum Range from 10^ to 10^ Pa
Large Area Exposure in Synchrotron Radiation Lithography Utilizing the Steering of the Electron Beam in the Storage Ring
Effects of Electron Irradiation on Two-Dimensional Electron Gas in AlGaAs/GaAs Heterostructure
Synergistic Enhancement of Direct Synchrotron Radiation Etching of a Resist by a Low-Energy Oxygen Beam
X-Ray Photoelectron Spectroscopy (XPS) Analysis of Oxide Formation on Silicon with High-Purity Ozone
Mass- and Electron-Spectroscopic Observation of Resist Decomposition by Synchrotron Radiation
Lithography Experiments Using Synchrotron Radiation from ETL Storage Ring : LATE NEWS
A New Method for Cleaning the Surface of Ultra High-Purity Iron by High-Purity Ozone Exposure and UV Irradiation
Initial Oxidation of Si(100)2×1 by Ozone : Transition of Growth Kinetics from Adsorption to Ultrathin Film Growth
Effect of Optical Breakdown on Second Harmonic Generation from Si(111)7×7 with Nd:YAG Laser
Adsorption of Benzene on Si(111)7×7 at Room Temperature Observed by Second Harmonic Generation (SHG)
Observation of Surface by Surface Electron Spectroscopic Tomography
Summary Abstract
Lithography Experiments using Synchrotron Radiation from ETL Storage Ring

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