Dose Rate Effect of the Preferential Sputtering of Copper-Nickel Alloys by Argon Ion at Elevated Temperatures
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概要
- 論文の詳細を見る
Compositional changes of the surface during argon ion bombardment were studied in copper-nickel alloys at temperatures up to 873 K by means of Auger electron spectroscopy (AES). Since at elevated temperatures the effect of impinging beam density was large, nickel enrichment was observed at high ion beam densities. At low ion beam densities copper enrichment occurred instead. The results are explained by the balance between the preferential sputtering of copper from the surface and enhanced diffusion of copper to the surface through the sputter-damaged layer.
- 社団法人応用物理学会の論文
- 1980-10-05
著者
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Ono Masatoshi
Electrotechnical Laboratory
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ISHIDA Yoichi
Institute of Industrial Science, University of Tokyo
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Ishida Yoichi
Institute Of Industrial Science University Of Tokyo
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Shimizu Hazime
Electrotechnical Laboratory
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KOYAMA Naoyuki
Institute of Industrial Science, University of Tokyo
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Koyama Naoyuki
Institute Of Industrial Science University Of Tokyo
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