Excellence of Gate Oxide Integrity in Metal-Oxide-Semiconductor Large-Scale-Integrated Circuits Based on P^-/P^- Thin-Film Epitaxial Silicon Wafers

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1997-05-15

著者

• Shimizu H

  Nihon Kesso Koogaku Co. Ltd. Gunma Jpn

• Fujita Masato

  Kofu Operation Of Semiconductor And Integrated Circuits Division Hitachi Ltd.

• Nagasawa K

  Semiconductor And Integrated Circuits Division Hitachi Ltd.

• Nagasawa Koichi

  Semiconductor And Integrated Circuits Division Hitachi Ltd.

• SHIMIZU Hirofumi

  Semiconductor Design & Development Center, Hitachi, Ltd.

• Shimizu H

  National Inst. Materials And Chemical Res. Ibaraki Jpn

• TAKEDA Kazuo

  Central Research Lab., Hitachi, Lid.

• ISOMAE Seiichi

  Central Research Lab., Hitachi, Lid.

• Takeda K

  Hitachi Ltd. Tokyo Jpn

• SUGINO Yuji

  Kofu, Operation of Semiconductor and Integrated Circuits Division, Hitachi Ltd.

• SUZUKI Norio

  Semiconductor and Integrated Circuits Division, Hitachi Ltd.

• KIYOTA Shogo

  Semiconductor and Integrated Circuits Division, Hitachi Ltd.

• FUJITA Masato

  Kofu, Operation of Semiconductor and Integrated Circuits Division, Hitachi Ltd.

• Shimizu Hirofumi

  High-technology Research Center And Faculty Of Engineering Kansai University

• Shimizu Hirofumi

  Semiconductor And Integrated Circuits Division Hitachi Ltd.

• Sugino Yuji

  Kofu Operation Of Semiconductor And Integrated Circuits Division Hitachi Ltd.

• Kiyota Shogo

  Semiconductor And Integrated Circuits Division Hitachi Ltd.

• Shimizu H

  High-technology Research Center And Faculty Of Engineering Kansai University

• Fujita M

  Shizuoka Univ. Shizuoka Jpn

• Shimizu Hideaki

  Department Of Reaction Chemistry Faculty Of Engineering The University Of Tokyo

• Shimizu Hirofumi

  Semiconductor & Integrated Circuits Division Hitachi Lid.

• Takeda Kazuo

  Central Research Laboratory Hitachi Ltd.

• Takeda Kazuo

  Central Research Lab. Hitachi Ltd.

• Suzuki Norio

  Semiconductor And Integrated Circuits Division Hitachi Ltd.

関連論文

• Superconducting Properties of Ba-Y-Cu-O Tape Prepared by the Doctor Blade Process : Electrical Properties of Condensed Matter
• Magnetic Properties and Upper Critical Fields of Sintered Tl-Ca-Ba-Cu-O Supercouiductors : Electrical Properties of Condensed Matter
• Upper Critical Field of New Oxide Superconductor Bi-Sr-Ca-Cu-O : Electrical Properties of Condensed Matter
• Simplified AC Photovoltaic Measurermemt of Minority Carrier Lifetime in Czochralski-Grown Silicon Wafers Having Ring-Distributed Stacking Faults
• Observation of Ring-Distributed Microdefects in Czochralski-Grown Silicon Wafers with a Scanning Photon Microscope and Its Diagnostic Application to Device Processing
• Comparison of Minority Carrier Lifetimes Measured by Photoconductive Decay and ac Photovoltaic Method : Techniques, Instrumentations and Measurement
• Nondestructive Observations of Surface Flaws and Contaminations in Silicon Wafers by Means of a Scanning Photon Microscope : Semiconductors and Semiconductor Devices
• Calibration of Minority Carrier Lifetimes Measured with an ac Photovoltaic Method : Techniques, Instrumentations and Measurement
• Sensitivity of Ion-Imaging Method and Mass Analysis using an Imaging Detector
• Direct Estimation of the Ionization Region for XHV Measurement by Laser Ionization
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• Direct Imaging of Spatial Distribution of Ions Generated by Nonresonant Multiphoton Ionization of H_2 Gas
• Preliminary Pressure Measurement in the Range of 10^ Pa Using a Picosecond Pulsed Laser
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• Simultaneous Measurement of Size and Depth of Each Defect in a Silicon Wafer Using Light Scattering at Two Wavelengths : Principle, Limitation and Applications of Optical Shallow Defect Analyzer
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• Dependence of Warpage of Czochralski-Grown Silicon Wafers on Oxygen Concentration and Its Application to MOS Image-Sensor Device
• Estimation of Epitaxial Temperature Using X-Ray Diffraction for Si Films Grown on (100) Si by Molecular Beam Epitaxy
• X-Ray Diffraction from Low-Temperature-Grown Silicon Films with Small Surface Roughness
• Main Cause of Surface Waveguides Formed under LiNbO_3 Crystal Surface during Thermal Treatment
• Studies on Particle Separation by Acoustic Radiation Force and Electrostatie Force
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• Stress Effect on Current-Induced Degradation of Be-Doped AlGaAs/GaAs Heterojunction Bipolar Transistors
• Characterization of Damaged Layer Using AC Surface Photovoltage in Silicon Wafers
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• Nondestructive Diagnostic Method Using AC Surface Photovoltage in Silicon Wafers Rinsed with Metal-Contaminated Water Solutions
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• AC Photovoltaic Images of Thermally Oxidized P-Type Silicon Wafers Contaminated with Metals

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