Highly Efficient Gettering of Heavy Metals Using Carbon Implanted Eptaxial Si Wafers

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概要

• 論文の詳細を見る
• 1998-09-07

著者

• Takeda K

  Hitachi Ltd. Hitachi Research Laboratory

• TAKEDA Kazuo

  Central Research Lab., Hitachi, Lid.

• ISOMAE Seiichi

  Central Research Lab., Hitachi, Lid.

• OHKURA Makoto

  Central Research Lab., Hitachi, Lid.

• Takeda Kazuyuki

  Department Of Energy Conversion Kyushu University

• Ohkura M

  Hitachi Ltd.

• Isomae S

  Hitachi Ltd. Tokyo Jpn

• ITOGA Toshihiko

  Central Research Laboratories, Hitachi Ltd.

• HOUZAWA Kazuyuki

  Central Research Laboratory, Hitachi, Ltd.

• Houzawa Kazuyuki

  Central Research Laboratory Hitachi Ltd.

• Itoga Toshihiko

  Central Research Laboratory Hitachi Ltd.

• Itoga Toshihiko

  Central Research Laboratories Hitachi Ltd.

• Takeda Kazuo

  Central Research Lab. Hitachi Ltd.

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