Takeda Kazuo | Central Research Lab. Hitachi Ltd.
スポンサーリンク
概要
関連著者
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TAKEDA Kazuo
Central Research Lab., Hitachi, Lid.
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Takeda Kazuo
Central Research Lab. Hitachi Ltd.
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Takeda K
Hitachi Ltd. Hitachi Research Laboratory
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ISOMAE Seiichi
Central Research Lab., Hitachi, Lid.
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Takeda Kazuyuki
Department Of Energy Conversion Kyushu University
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OHKURA Makoto
Central Research Lab., Hitachi, Lid.
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Ohkura M
Hitachi Ltd.
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Isomae S
Hitachi Ltd. Tokyo Jpn
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Shimizu H
Nihon Kesso Koogaku Co. Ltd. Gunma Jpn
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UMEMURA Shin-ichiro
Advanced Research Laboratory, Hitachi Ltd
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Fujita Masato
Kofu Operation Of Semiconductor And Integrated Circuits Division Hitachi Ltd.
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Umemura Shin-ichiro
Advanced Research Laboratory Hitachi Ltd.
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Hiraiwa Atsushi
Semiconductor & Integrated Circuit Division Hitachi Ltd.
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Nagasawa K
Semiconductor And Integrated Circuits Division Hitachi Ltd.
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Nagasawa Koichi
Semiconductor And Integrated Circuits Division Hitachi Ltd.
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Kawae Tatsuya
Department Of Applied Quantum Physics Kyushu University
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SHIMIZU Hirofumi
Semiconductor Design & Development Center, Hitachi, Ltd.
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Shimizu H
National Inst. Materials And Chemical Res. Ibaraki Jpn
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Matsui Shigeru
Instrument Div. Hitachi Ltd.
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MAESHIMA Muneo
Instrument Div., Hitachi Ltd.
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Takeda K
Hitachi Ltd. Tokyo Jpn
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SUGINO Yuji
Kofu, Operation of Semiconductor and Integrated Circuits Division, Hitachi Ltd.
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SUZUKI Norio
Semiconductor and Integrated Circuits Division, Hitachi Ltd.
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KIYOTA Shogo
Semiconductor and Integrated Circuits Division, Hitachi Ltd.
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FUJITA Masato
Kofu, Operation of Semiconductor and Integrated Circuits Division, Hitachi Ltd.
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Shimizu Hirofumi
High-technology Research Center And Faculty Of Engineering Kansai University
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Shimizu Hirofumi
Semiconductor And Integrated Circuits Division Hitachi Ltd.
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Sugino Yuji
Kofu Operation Of Semiconductor And Integrated Circuits Division Hitachi Ltd.
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Kiyota Shogo
Semiconductor And Integrated Circuits Division Hitachi Ltd.
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Yasuda K
Hitachi Ltd. Saitama Jpn
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YASUDA Kenji
Advanced Research Laboratory, Hitachi Ltd.
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Shimizu H
High-technology Research Center And Faculty Of Engineering Kansai University
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Umemura S
Hitachi Ltd. Tokyo Jpn
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Maeshima Muneo
Instrument Div. Hitachi Ltd.
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ITOGA Toshihiko
Central Research Laboratories, Hitachi Ltd.
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HOUZAWA Kazuyuki
Central Research Laboratory, Hitachi, Ltd.
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Fujita M
Shizuoka Univ. Shizuoka Jpn
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ISHIDA Hidetsugu
Central Research Lab., Hitachi, Ltd.
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Ishida Hidetsugu
Central Research Lab. Hitachi Ltd.
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Houzawa Kazuyuki
Central Research Laboratory Hitachi Ltd.
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Yasuda Kenji
Advanced Research Lab. Hitachi Lid.
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Shimizu Hideaki
Department Of Reaction Chemistry Faculty Of Engineering The University Of Tokyo
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Shimizu Hirofumi
Semiconductor & Integrated Circuits Division Hitachi Lid.
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Itoga Toshihiko
Central Research Laboratory Hitachi Ltd.
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Itoga Toshihiko
Central Research Laboratories Hitachi Ltd.
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Takeda Kazuo
Central Research Laboratory Hitachi Ltd.
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Suzuki Norio
Semiconductor And Integrated Circuits Division Hitachi Ltd.
著作論文
- Simultaneous Measurement of Size and Depth of Each Defect in a Silicon Wafer Using Light Scattering at Two Wavelengths : Principle, Limitation and Applications of Optical Shallow Defect Analyzer
- Excellence of Gate Oxide Integrity in Metal-Oxide-Semiconductor Large-Scale-Integrated Circuits Based on P^-/P^- Thin-Film Epitaxial Silicon Wafers
- Studies on Particle Separation by Acoustic Radiation Force and Electrostatie Force
- Highly Efficient Gettering of Heavy Metals Using Carbon Implanted Eptaxial Si Wafers
- A New Method for Measurement of Micro-Defects near the Surface of Si Wafers : Optical Shallow Defect Analyzer (OSDA)