Ohkura M | Hitachi Ltd.
スポンサーリンク
概要
関連著者
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OHKURA Makoto
Central Research Lab., Hitachi, Lid.
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Ohkura M
Hitachi Ltd.
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ITOGA Toshihiko
Central Research Laboratories, Hitachi Ltd.
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Itoga Toshihiko
Central Research Laboratories Hitachi Ltd.
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Takeda K
Hitachi Ltd. Hitachi Research Laboratory
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TAKEDA Kazuo
Central Research Lab., Hitachi, Lid.
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ISOMAE Seiichi
Central Research Lab., Hitachi, Lid.
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Takeda Kazuyuki
Department Of Energy Conversion Kyushu University
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Kojima H
Nagoya Univ. Nagoya Jpn
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Isomae S
Hitachi Ltd. Tokyo Jpn
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KOJIMA Hisao
Central Research Laboratory, Hitachi Ltd.
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Itoga T
Central Research Laboratory Hitachi Ltd.
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Takeda Kazuo
Central Research Lab. Hitachi Ltd.
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Hiraiwa Atsushi
Central Research Laboratory Hitachi Ltd.
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KUME Hitoshi
Central Research Laboratory, Hitachi Ltd.
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Kawae Tatsuya
Department Of Applied Quantum Physics Kyushu University
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Matsui Shigeru
Instrument Div. Hitachi Ltd.
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MAESHIMA Muneo
Instrument Div., Hitachi Ltd.
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Yugami Jiro
Central Research Laboratory Hitachi Ltd.
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Yugami Jiro
Central Research Laboratory
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Kume Hitoshi
Central Research Laboratory Hitachi Ltd.
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Kume Hitoshi
Central Research Laboratory
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Maeshima Muneo
Instrument Div. Hitachi Ltd.
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HARAGUCHI Keiichi
Central Research Laboratory, Hitachi, Ltd.
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Haraguchi Keiichi
Central Research Laboratory Hitachi Ltd.
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USHIYAMA Masahiro
Central Research Laboratory Hitachi Ltd.
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HOUZAWA Kazuyuki
Central Research Laboratory, Hitachi, Ltd.
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Houzawa Kazuyuki
Central Research Laboratory Hitachi Ltd.
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Itoga Toshihiko
Central Research Laboratory Hitachi Ltd.
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Yugami Jiro
Central Research Laboratory, Hitachi Ltd.
著作論文
- Simultaneous Measurement of Size and Depth of Each Defect in a Silicon Wafer Using Light Scattering at Two Wavelengths : Principle, Limitation and Applications of Optical Shallow Defect Analyzer
- A New Simple Method for Extracting the Capacitance Coupling Coefficients of Sub-0.5-μm Flash Memory Cells (Special Issue on Microelectronic Test Structures)
- Highly Efficient Gettering of Heavy Metals Using Carbon Implanted Eptaxial Si Wafers
- Degradation of n^+/p Junction Characteristics by Aluminum Contamination
- The Increase of the Native Oxide Thickness on H-Terminated Si Surfaces by Gaseous Contamination in a Clean Room Atmosphere