ITOGA Toshihiko | Central Research Laboratories, Hitachi Ltd.
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概要
関連著者
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ITOGA Toshihiko
Central Research Laboratories, Hitachi Ltd.
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Itoga Toshihiko
Central Research Laboratories Hitachi Ltd.
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Itoga T
Central Research Laboratory Hitachi Ltd.
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Kojima H
Nagoya Univ. Nagoya Jpn
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KOJIMA Hisao
Central Research Laboratory, Hitachi Ltd.
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OHKURA Makoto
Central Research Lab., Hitachi, Lid.
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Ohkura M
Hitachi Ltd.
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Motai Kumi
Institute For Materials Research (imr) Tohoku University
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Motai Kumi
Central Research Laboratory Hitachi Ltd.
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Kanehori Keiichi
Central Research Laboratory Hitachi Ltd
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Irie T
Kyoto Univ. Kyoto Jpn
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IRIE Takashi
Central Research Laboratory, Hitachi Ltd.
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Kanehori K
Hitachi Ltd. Tokyo Jpn
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MATSUBARA Atsuko
Central Research Laboratory, Hitachi Ltd.
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Matsubara Akifumi
Central Research Laboratory Hitachi Ltd.
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Takeda K
Hitachi Ltd. Hitachi Research Laboratory
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Hiraiwa Atsushi
Central Research Laboratory Hitachi Ltd.
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Suzuki Michio
Hitachi Ltd.
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TAKEDA Kazuo
Central Research Lab., Hitachi, Lid.
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ISOMAE Seiichi
Central Research Lab., Hitachi, Lid.
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Takeda Kazuyuki
Department Of Energy Conversion Kyushu University
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YAMANAKA Ryoko
Central Research Laboratory, Hitachi Limited
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Yugami Jiro
Central Research Laboratory Hitachi Ltd.
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Yugami Jiro
Central Research Laboratory
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Saiki Atsushi
Hitachi Plant Engineering & Construction Co. Ltd.
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Yamanaka R
Hitachi Ltd. Tokyo Jpn
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Yamanaka Ryoko
Central Research Laboratory Hitachi Limited
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Isomae S
Hitachi Ltd. Tokyo Jpn
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Tanaka A
Hitachi Plant Engineering & Construction Co. Ltd.
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OSHIO Ryoji
Hitachi Plant Engineering & Construction Co., Ltd.
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TANAKA Akio
Hitachi Plant Engineering & Construction Co., Ltd.
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Oshio Ryoji
Hitachi Plant Engineering & Construction Co. Ltd.
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HOUZAWA Kazuyuki
Central Research Laboratory, Hitachi, Ltd.
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Houzawa Kazuyuki
Central Research Laboratory Hitachi Ltd.
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Itoga Toshihiko
Central Research Laboratory Hitachi Ltd.
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Suzuki Michio
Hitachi Plant Engineering & Construction Co. Ltd.
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Takeda Kazuo
Central Research Lab. Hitachi Ltd.
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Yugami Jiro
Central Research Laboratory, Hitachi Ltd.
著作論文
- Development of Ammonia Adsorption Filter and Its Application to LSI Manufacturing Environment
- The Effect of Isopropyl Alcohol Adsorption on the Electrical Characteristics of Thin Oxide
- The Effect of IPA Adsorption on Thin Oxide
- Highly Efficient Gettering of Heavy Metals Using Carbon Implanted Eptaxial Si Wafers
- Degradation of n^+/p Junction Characteristics by Aluminum Contamination
- The Increase of the Native Oxide Thickness on H-Terminated Si Surfaces by Gaseous Contamination in a Clean Room Atmosphere
- A Ceramic Plasma Torch for Determining Silicon Content in HF Solutions by Inductively Coupled Plasma Atomic Emission Spectrometry
- Ultra-Shallow Depth Profiling of Arsenic Implants in Silicon by Hydride Generation-Inductively Coupled Plasma Atomic Emission Spectrometry