Development of Ammonia Adsorption Filter and Its Application to LSI Manufacturing Environment

スポンサーリンク

概要

著者

関連論文

Special Issue on Network Operations and Management
Investigation of Acid Catalyzed Insolubilization Reactions for Alicyclic Polymers with Carboxyl Groups
Synthesis and Dissolution Characteristics of Novel Alicyclic Polymers with Monoacid Ester Structures
X-Ray Lithography with a Wet-Silylated and Dry-Developed Resist
Roles of Surface Functional Groups on TiN and SiN Substrates in Resist Pattern Deformations
Investigation of Resist Pattern Deformation in Chemical Amplification Resists on SiN_x Substrates
Development of Ammonia Adsorption Filter and Its Application to LSI Manufacturing Environment
The Effect of Isopropyl Alcohol Adsorption on the Electrical Characteristics of Thin Oxide
The Effect of IPA Adsorption on Thin Oxide
X-Ray Photoelectron Spectroscopy Study of Native Oxidation on Misoriented Si(100)
Highly Efficient Gettering of Heavy Metals Using Carbon Implanted Eptaxial Si Wafers
Degradation of n^+/p Junction Characteristics by Aluminum Contamination
The Increase of the Native Oxide Thickness on H-Terminated Si Surfaces by Gaseous Contamination in a Clean Room Atmosphere
A New Pupil Filter for Annular Illumination in Optical Lithography
A Ceramic Plasma Torch for Determining Silicon Content in HF Solutions by Inductively Coupled Plasma Atomic Emission Spectrometry
Ultra-Shallow Depth Profiling of Arsenic Implants in Silicon by Hydride Generation-Inductively Coupled Plasma Atomic Emission Spectrometry
Advantages of Fluorine Introduction in Boron Implanted Shallow p^+/n-Junction Formation
Improvement of SiO2/Si Interface Properties Utilising Fluorine Ion Implantation and Drive-in Diffusion
Degradation of n+/p Junction Characteristics by Aluminum Contamination

もっと見る

スポンサーリンク