Investigation of Resist Pattern Deformation in Chemical Amplification Resists on SiN_x Substrates
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1995-12-30
著者
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Hattori Takashi
Central Research Laboratory Hitachi Ltd.
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MINE Toshiyuki
Central Research Laboratory, Hitachi, Ltd.
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TANAKA Toshihiko
Central Research Laboratory, Hitachi, Ltd.
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YAMANAKA Ryoko
Central Research Laboratory, Hitachi Limited
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Mine T
Central Research Laboratory Hitachi Ltd.
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Mine Toshiyuki
Central Research Laboratory Hitachi Ltd
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Yamanaka R
Hitachi Ltd. Tokyo Jpn
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Yamanaka Ryoko
Central Research Laboratory Hitachi Limited
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Terasawa T
Hitachi Ltd. Tokyo Jpn
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Tanaka Toshihiko
Central Research Laboratory, Hitachi Ltd.
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Hattori Takashi
Central Research Laboratory, Hitachi, Ltd.
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