単一電子メモリの現状と将来

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Analysis of Polymer Formation during SiO_2 Microwave Plasma Etching
Estimation of Ion Incident Angle from Si Etching Profiles
A 6.93-μm^2 Full CMOS SRAM Cell Technology for 1.8-V High-Performance Cache Memory
HISTOLOGICAL AND IMMUNOHISTOCHEMICAL STUDIES ON THE LOCALIZATION OF IMMUNOGLOBULINS IN PORCINE PLACENTA
Highly Anisotropic Etching of Polysilicon by Time-Modulation Bias
Highly Selective Etching of Poly-Si by Time Modulation Bias
Low-Temperature Etching for Deep-Submicron Trilayer Resist
Tungsten Gate Technology for Quarter-Micron Application
Tungsten Gate Technology for Quarter-Micron Application
Fabrication of Less Than a 10 nm Wide Polycrystalline Silicon Nano Wire
Fabrication and Operation of Si-Coupled Superconducting FET with 0.1μm Gate : Microfabrication and Physics
Electro-Luminescence from Ultra-Thin Silicon
単一電子メモリの現状と将来
A 128Mb Single-Electron Memory
Effect of Basic Additives on Acid-Catalyzed Electron-Beam Negative Resist Using Intramolecular Dehydration of Phenylcarbinol
Nanometer Electron Beam Lithography with Azide-Phenolic Resin Resist Systems
Fine Pattern Fabrication below 100 nm with 70 kV Cell Projection Electron Beam Lithography
Estimation of the Thickness of Ultrathin Silicon Nitride Films by X-Ray Photoelectron Spectroscopy
Amorphous Channel SESO Memory with Good Logic Process Compatibility for Low-power High-density Embedded RAM
Roles of Surface Functional Groups on TiN and SiN Substrates in Resist Pattern Deformations
Investigation of Resist Pattern Deformation in Chemical Amplification Resists on SiN_x Substrates
Characterization of One-Dimensional Conduction in an Ultra-Thin Poly-Si Wire
Electron Beam Direct Writing Technology for 64-Mb DRAM LSIs : Lithography Technology
Electron Beam Direct Writing Technology for 64-Mb DRAM LSIs
Novel Alignment Method for Planarized Substrates in Electron Beam Lithography
A Novel Laser Annealing Process for Advanced CMOS with Suppressed Gate Depletion and Ultra-shallow Junctions
Low-Voltage ULSI Design (Special Section on the 1992 VLSI Circuits Symposium)
Random Modulation: Multi-Threshold-Voltage Design Methodology in Sub-2-V Power Supply CMOS (Special Issue on Low-power LSIs and Technologies)
A Selector-Merged Flip-Flop
Electro-Luminescence from Ultra-Thin Silicon
Effects of Thin Film Interference on Junction Activation during Sub-Millisecond Annealing
Novel Laser Annealing Process for Advanced Complementary Metal Oxide Semiconductor Devices with Suppressed Polycrystalline Silicon Gate Depletion and Ultra shallow Junctions
Electron Trap Characteristics of Silicon Rich Silicon Nitride Thin Films
Highly Anisotropic Etching of Polysilicon by Time-Modulation Bias
Investigation of Relationship between Interface State and Random Telegraph Noise Using Metal-Oxide-Semiconductor Field-Effect Transistors Fabricated on Si(100), (110), and (111) Substrates
Light Detection and Emission in Germanium-on-Insulator Diodes
Tungsten Gate Technology for Quarter-Micron Application
State Transition of a Defect Causing Random-Telegraph-Noise Fluctuation in Stress-Induced Leakage Current of Thin SiO
State Transition of a Defect Causing Random-Telegraph-Noise Fluctuation in Stress-Induced Leakage Current of Thin SiO₂ Films in a Metal-Oxide-Silicon Structure
Characterization and Modeling of Voltage and Temperature Dependence of Capacitance in Al2O3-Laminated Ta2O5 Metal–Insulator–Metal Capacitor

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