Fabrication of Less Than a 10 nm Wide Polycrystalline Silicon Nano Wire
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1994-01-30
著者
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Kure Tokuo
Central Research Laboratory, Hitachi, Ltd.
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Kure Tokuo
Central Research Laboratory Hitachi Ltd
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GOTO Yasushi
Central Research Laboratory, Hitachi, Ltd.
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KOBAYASHI Takashi
Central Research Laboratory, Hitachi Ltd.
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WADA Yasuo
Advanced Research Laboratory, Hitachi Ltd.
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YOSHIMURA Toshiyuki
Central Research Laboratory, Hitachi, Ltd.
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SUDO Yoshimi
Central Research Laboratory, Hitachi, Ltd.
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KONDO Seiichi
Advanced Research Laboratory, Hitachi, Ltd.
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Kobayashi Takashi
Central Research Laboratory Hitachi Ltd.
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Wada Y
Institute Of Industrial Science University Of Tokyo:core Research For Evolutional Science And Techno
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Goto Yasushi
Central Research Laboratory Hitachi Ltd.
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Sudo Yoshimi
Central Research Laboratory Hitachi Ltd.
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Yoshimura Toshiyuki
Central Research Laboratory Hitachi Ltd.
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Wada Yasuo
Central Research Laboratory Hitach Ltd.
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Wada Yasuo
Advanced Research Laboratory Hitachi Ltd.
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Kondo Seiichi
Advanced Research Laboratory Hitachi Ltd.
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