Oxidation Characteristics of Nitrogen Implanted Silicon
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1976-02-05
著者
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Ashikawa Mikio
Research And Development Promotion Center Hitachi Ltd.
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Ashikawa Mikio
Research And Development Promotion Center Hitachi Lid.
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WADA Yasuo
Central Research Laboratory, Hitachi, Ltd.
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Wada Yasuo
Central Research Laboratory Hitach Ltd.
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