Ashikawa Mikio | Research And Development Promotion Center Hitachi Lid.
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概要
関連著者
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Ashikawa Mikio
Research And Development Promotion Center Hitachi Ltd.
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Ashikawa Mikio
Research And Development Promotion Center Hitachi Lid.
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WADA Yasuo
Central Research Laboratory, Hitachi, Ltd.
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Wada Yasuo
Central Research Laboratory Hitach Ltd.
著作論文
- Silicon Planar Devices Using Nitrogen Ion Implantation
- Oxidation Characteristics of Nitrogen Implanted Silicon