Estimation of the Thickness of Ultrathin Silicon Nitride Films by X-Ray Photoelectron Spectroscopy
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1993-08-15
著者
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NAKAZAWA Masatoshi
Central Research Laboratory, Hitachi Lid.
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MINE Toshiyuki
Central Research Laboratory, Hitachi, Ltd.
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Nakazawa Masatoshi
Central Resarch Laboratory Hitachi Ltd.
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Nakazawa Masatoshi
Central Research Laboratory Hitachi Ltd
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Mine Toshiyuki
Central Research Laboratory Hitachi Ltd
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MUTO Akiko
Central Research Laboratory, Hitachi Ltd
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Muto A
Nagoya Univ. Nagoya Jpn
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Muto Akiko
Central Research Laboratory Hitachi Ltd
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