A Proposed Atomic-Layer-Deposition of Germanium on Si Surface

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1997-03-30

著者

• 菅原 聡

  Department Of Electronic Engineering The University Of Tokyo

• 松村 正清

  東京工業大学工学部:(現)(株)液晶先端技術開発センター

• Matsumura Masakiyo

  Department of Physical Electronics, Tokyo Institute of Technology

• SUGAHARA Satoshi

  Department of Physical Electronics, Tokyo Institute of Technology

• UCHIDA Yasutaka

  Department of Electronics and Information Science, Teikyo University of Science and Technology

• Hattori Takeo

  Department of Electrical and Electronic Engineering, Musashi Institute of Technology

• Hattori Tetsuya

  Depaetment Of Electrical And Electronic Engineering Tokyo Institute Of Technology

• HATTORI Takeo

  New Industry Creation Hatchery Center, Tohoku University

• Nagai Tomonori

  Department of Legal Medicine, Kitasato University School of Medicine

• MATSUYAMA Motohiro

  Department of Physical Electronics, Tokyo Institute of Technology

• KITAMURA Takuya

  Department of Physical Electronics, Tokyo Institute of Technology

• Hattori Takashi

  Central Research Laboratory Hitachi Ltd.

• Sugahara Satoshi

  Department Of Electronic Engineering The University Of Tokyo

• 松村 正清

  東京工業大学工学部電子物理科

• Matsumura Masakiyo

  Department Of Electrical And Electronic Engineering Tokyo Institute Of Technology

• Nagai Tomonori

  Department Of Electronics And Information Science Teikyo University Of Science And Technology

• Kitamura Takuya

  Department Of Physical Electronics Tokyo Institute Of Technology

• Hattori T

  New Industry Creation Hatchery Center Tohoku University

• Nagai T

  Department Earth And Space Science Graduate School Of Science Osaka University

• Uchida Y

  Aichi Inst. Technol. Toyota Jpn

• Hattori Takeo

  Department Of Electrical & Electronic Engineering Musashi Institute Of Technology

• Kitamura T

  Murata Mfg. Co. Ltd. Kyoto Jpn

• Uchida Y

  Department Of Electrical Engineering Aichi Institute Of Technology Toyota

• Uchida Y

  Yamaguchi Univ. Yamaguchi Jpn

• Uchida Yasutaka

  Department Of Electrical And Electronic Engineering Tokyo Institute Of Technology

• Kitamura Takuya

  Department Of Basic Radiological Technology Niigata University School Of Health Sciences Faculty Of

• Hattori Takeo

  Faculty Of Engineering Musashi Institute Of Technology

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